Silicon Carbide Wafer Chuck

VeTek Semiconductor Silicon Carbide Wafer Chuck uses the excellent properties of Silicon Carbide materials to meet the stringent requirements of semiconductor production, especially in semiconductor processing that requires extremely high precision and reliability.

In the semiconductor processing process, Silicon Carbide has excellent high temperature resistance (can work stably at up to 1400°C), low conductivity (SiC has a relatively low conductivity, typically 10^^-3 S/m) and low thermal expansion coefficient (about 4.0 × 10^^-6 /°C), which is an indispensable and important material, especially suitable for the manufacture of Silicon Carbide Wafer Chuck.

During the epitaxial growth process, a thin layer of semiconductor material is deposited on a substrate, requiring absolute stability from the wafer to ensure uniform and high-quality film deposition layers. The SiC Vacuum Chuck achieves this by creating a firm, consistent vacuum hold to prevent any movement or deformation of the wafer.

The Silicon Carbide Wafer Chuck also offers excellent resistance to thermal shock. Rapid temperature changes are common in semiconductor manufacturing, and materials that cannot withstand these fluctuations may crack, bend, or fail. Silicon carbide has a low coefficient of thermal expansion and can maintain its shape and function even under drastic temperature changes, ensuring that the wafer remains secure during the epitaxy process without movement or misalignment.

Moreover, the epitaxy process often involves reactive gases and other corrosive chemicals. The chemical inertness of the SiC Wafer Chuck ensures that it is not affected by these harsh environments, maintaining its performance and extending its service life. This chemical durability not only reduces the frequency of Wafer Chuck replacement, but also ensures consistent product performance over multiple production cycles, helping to improve the overall efficiency and cost-effectiveness of the semiconductor manufacturing process.

VeTek Semiconductor is a leading manufacturer and supplier of Silicon Carbide Wafer Chuck products in China. We can provide various types of Chuck products such as Porous SiC Ceramic Chuck, Porous SiC Vacuum Chuck, Porous Ceramic Vacuum Chuck and TaC Coated Chuck, etc. VeTek Semiconductor is committed to providing advanced technology and product solutions for the semiconductor industry. We sincerely hope to become your long-term partner in China.

SEM DATA OF CVD SIC FILM CRYSTAL STRUCTURE：

VeTek Semiconductor Silicon Carbide Wafer Chuck Shops：