China SiC Epitaxy Process Manufacturer, Supplier, Factory
VeTek Semiconductor's unique carbide coatings provide superior protection for graphite parts in the SiC Epitaxy Process for the processing of demanding semiconductor and composite semiconductor materials. The result is extended graphite component life, preservation of reaction stoichiometry, inhibition of impurity migration to epitaxy and crystal growth applications, resulting in increased yield and quality.
Our tantalum carbide (TaC) coatings protect critical furnace and reactor components at high temperatures (up to 2200°C) from hot ammonia, hydrogen, silicon vapors and molten metals. VeTek Semiconductor has a wide range of graphite processing and measurement capabilities to meet your customized requirements, so we can offer a fee-paying coating or full-service, with our team of expert engineers ready to design the right solution for you and your specific application.
Compound semiconductor crystals
VeTek Semiconductor can provide special TaC coatings for various components and carriers. Through VeTek Semiconductor's industry leading coating process,the TaC coating can obtain high purity, high temperature stablity and high chemical resistance,thereby improving the product quality of crystal TaC/GaN)and EPl layers, and extending the lifetime of critical reactor components.
Thermal insulators
SiC, GaN and AlN crystal growth components including crucibles, seed holders, deflectors and filters. Industrial assemblies including resistive heating elements, nozzles, shielding rings and brazing fixtures, GaN and SiC epitaxial CVD reactor components including wafer carriers, satellite trays, shower heads, caps and pedestals, MOCVD components.
Purpose:
LED(Light Emitting Diode) Wafer Carrier
ALD(Semiconductor) Susceptor
EPI Susceptor(SiC Epitaxy Process)
TaC coated Satellite Susceptor 
TaC Coating Susceptor&Ring 
TaC Coating parts 
Halfmoon Parts with TaC Coating
Comparision of SiC Coating and TaC Coating:
| SiC | TaC | |
| Main Features | Ultra high purity,Excellent Plasma resistance | Excellent high temperature stability(high temperature process conformance) |
| Purity | >99.9999% | >99.9999% |
| Density (g/cm 3) | 3.21 | 15 |
| Hardness (kg/mm 2) | 2900-3300 | 6.7-7.2 |
| Resistivity [Ωcm] | 0.1-15,000 | <1 |
| Thermal conductivity (W/m-K) | 200-360 | 22 |
| Coefficient of thermal expansion(10-6/℃) | 4.5-5 | 6.3 |
| Application | Semiconductor Equipment Ceramic jig(Focus Ring, Shower Head, Dummy Wafer) | SiC Single crystal growth, Epi, UV LED Equipment parts |
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Tantalum Carbide TaC Coated Halfmoon
VeTek Semiconductor is the leading manufacturer and supplier in China for Tantalum Carbide TaC Coated Halfmoon, we specialized in R&D and production,can control the quality well and offer a competitive price. You are welcome to visit our factory for further discussion on a long-term cooperation.
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TaC Coated Three-petal Ring
VeTek Semiconductor is a leading TaC Coated Three-petal Ring manufacturer and innovator in China.We have been specialized in TaC and SiC coating for many years.Our products have a corrosion resistance, high strength. We look forward to becoming your long-term partner in China.
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Tantalum Carbide Coated Chuck
VeTek Semiconductor is a leading Tantalum Carbide Coated Chuck manufacturer and innovator in China.We have been specialized in TaC coating for many years.Our products have a high purity and high temperature resistance up to 2000℃.We look forward to becoming your long-term partner in China.
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Tantalum Carbide Coated Cover
VeTek Semiconductor is a leading Tantalum Carbide Coated Cover manufacturer and innovator in China.We have been specialized in TaC and SiC coating for many years.Our products have a corrosion resistance, high strength. We look forward to becoming your long-term partner in China.
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Ultra Pure Graphite Lower Halfmoon
VeTek Semiconductor is a leading supplier of customized Ultra Pure Graphite Lower Halfmoon in China, specializing in advanced materials for many years. Our Ultra Pure Graphite Lower Halfmoon is specifically designed for SiC epitaxial equipment, ensuring excellent performance. Made from ultra-pure imported graphite, it offers reliability and durability. Visit our factory in China to explore our high-quality Ultra Pure Graphite Lower Halfmoon firsthand.
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Upper Halfmoon Part SiC Coated
VeTek Semiconductor is a leading supplier of customized Upper Halfmoon Part SiC coated in China, specializing in advanced materials for over 20 years. VeTek Semiconductor Upper Halfmoon Part SiC coated is specifically designed for SiC epitaxial equipment, serving as a crucial component in the reaction chamber. Made from ultra-pure, semiconductor-grade graphite, it ensures excellent performance. We invite you to visit our factory in China.
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As a professional SiC Epitaxy Process manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable SiC Epitaxy Process made in China, you can leave us a message.
