China SiC Epitaxy Process Manufacturer, Supplier, Factory

VeTek Semiconductor's unique carbide coatings provide superior protection for graphite parts in the SiC Epitaxy Process for the processing of demanding semiconductor and composite semiconductor materials. The result is extended graphite component life, preservation of reaction stoichiometry, inhibition of impurity migration to epitaxy and crystal growth applications, resulting in increased yield and quality.

Our tantalum carbide (TaC) coatings protect critical furnace and reactor components at high temperatures (up to 2200°C) from hot ammonia, hydrogen, silicon vapors and molten metals. VeTek Semiconductor has a wide range of graphite processing and measurement capabilities to meet your customized requirements, so we can offer a fee-paying coating or full-service, with our team of expert engineers ready to design the right solution for you and your specific application.

Compound semiconductor crystals

VeTek Semiconductor can provide special TaC coatings for various components and carriers. Through VeTek Semiconductor's industry leading coating process,the TaC coating can obtain high purity, high temperature stablity and high chemical resistance,thereby improving the product quality of crystal TaC/GaN)and EPl layers, and extending the lifetime of critical reactor components.

Thermal insulators

SiC, GaN and AlN crystal growth components including crucibles, seed holders, deflectors and filters. Industrial assemblies including resistive heating elements, nozzles, shielding rings and brazing fixtures, GaN and SiC epitaxial CVD reactor components including wafer carriers, satellite trays, shower heads, caps and pedestals, MOCVD components.

Purpose:

● LED(Light Emitting Diode) Wafer Carrier

● ALD(Semiconductor) Susceptor

● EPI Susceptor(SiC Epitaxy Process)

CVD TaC coating planetary SiC epitaxial susceptor TaC Coated Ring for SiC Epitaxial Reactor TaC Coated Three-petal Ring Tantalum Carbide Coated Halfmoon Part for LPE

Comparision of SiC Coating and TaC Coating:

	SiC	TaC
Main Features	Ultra high purity,Excellent Plasma resistance	Excellent high temperature stability(high temperature process conformance)
Purity	>99.9999%	>99.9999%
Density (g/cm³)	3.21	15
Hardness (kg/mm²)	2900-3300	6.7-7.2
Resistivity [Ωcm]	0.1-15,000	<1
Thermal conductivity (W/m-K)	200-360	22
Coefficient of thermal expansion(10^-6/℃)	4.5-5	6.3
Application	Semiconductor Equipment Ceramic jig(Focus Ring, Shower Head, Dummy Wafer)	SiC Single crystal growth, Epi, UV LED Equipment parts

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CVD TaC coated three-petal guide ring

VeTek Semiconductor has experienced many years of technological development and has mastered the leading process technology of CVD TaC coating. CVD TaC coated three-petal guide ring is one of VeTek Semiconductor's most mature CVD TaC coating products and is an important component for preparing SiC crystals by PVT method. With the help of VeTek Semiconductor, I believe your SiC crystal production will be smoother and more efficient.

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Tantalum Carbide Coated Porous Graphite

Tantalum Carbide Coated Porous Graphite is an indispensable product in the semiconductor processing process, especially in the SIC crystal growth process. After continuous R&D investment and technology upgrades, VeTek Semiconductor's TaC Coated Porous Graphite product quality has won high praise from European and American customers. Welcome to your further consultation.

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CVD TaC coating planetary SiC epitaxial susceptor

CVD TaC coating planetary SiC epitaxial susceptor is one of the core components of MOCVD planetary reactor. Through CVD TaC coating planetary SiC epitaxial susceptor, the large disk orbits and the small disk rotates, and the horizontal flow model is extended to multi-chip machines, so that it has both the high-quality epitaxial wavelength uniformity management and defect optimization of single-chip machines and the production cost advantages of multi-chip machines.VeTek Semiconductor can provide customers with highly customized CVD TaC coating planetary SiC epitaxial susceptor. If you also want to make a planetary MOCVD furnace like Aixtron, come to us!

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GaN Epitaxy susceptor

VeTek Semiconductor is a Chinese company that is a world-class manufacturer and supplier of GaN Epitaxy susceptor. We have been working in the semiconductor industry such as silicon carbide coatings and GaN Epitaxy susceptor for a long time. We can provide you with excellent products and favorable prices. VeTek Semiconductor looks forward to becoming your long-term partner.

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TaC coated wafer susceptor

eTek Semiconductor TaC Coated Wafer Susceptor is a graphite tray coated with tantalum carbide for silicon carbide epitaxial growth to improve wafer quality and performance. VeTek is selected because of its advanced coating technology and durable solutions to ensure excellent SiC epitaxy results and extended susceptor life, welcome your further inquiries.

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TaC Coating Guide Rings

As a leading manufacturer of TaC Coating Guide Rings products in China, VeTek Semiconductor TaC coated guide rings are important components in MOCVD equipment, ensuring accurate and stable gas delivery during epitaxial growth, and are an indispensable material in semiconductor epitaxial growth. Welcome to consult us.

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As a professional SiC Epitaxy Process manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable SiC Epitaxy Process made in China, you can leave us a message.