CVD SiC coating Epitaxy susceptor

VeTek Semiconductor's CVD SiC Coating Epitaxy Susceptor is a precision-engineered tool designed for semiconductor wafer handling and processing. This SiC Coating Epitaxy Susceptor plays a vital role in promoting the growth of thin films, epilayers, and other coatings, and can precisely control temperature and material properties. Welcome your further inquiries.

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Product Description

CVD SiC Coating Epitaxy Susceptor is a type of MOCVD LED Epi Susceptor, which plays a central role in the CVD reactor. As an Epi Susceptor, it is not only a heat source, but also provides a stable support platform for the substrate during the deposition process. SiC Coating can effectively reduce the oxidation and contamination of Graphite Susceptor in high temperature environments, thereby ensuring the high purity of the deposited material.

Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain Size	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10^-6K^-1

CVD SiC Coating Epitaxy Susceptor Product Advantages:

● Precise Deposition: With the CVD SiC Coating Epitaxy Susceptor, you can achieve precisely controlled deposition of thin films and coatings to obtain high-quality and repeatable results.

● Reduced Contamination: SiC coating minimizes the risk of contamination from Epi Susceptor based Graphite, ensuring the purity of the deposited material.

● Durability: SiC coating enhances the oxidation resistance and chemical corrosion resistance of Graphite Epitaxy Susceptor, giving it a longer service life and higher reliability.

VeTek Semiconductor is committed to providing high-quality products and competitive prices. Whether it is Si EPI Susceptor or High purity Graphite EPI Susceptor, we can meet your needs. We are looking forward to being your long-term partner in China.

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