Hot Zone graphite heater

VeTek Semiconductor Hot Zone graphite heaters are designed to handle the extreme conditions found within high temperature furnaces. The heaters are able to withstand the harsh environments commonly found in high temperature processing, depending on the specific product features listed below.

Uniform temperature distribution: Hot Zone graphite heater is known for its excellent uniform heating characteristics, thanks to its perfect combination of high-precision material selection and precision processing technology. Such uniformity ensures a smooth distribution of temperature across the entire heating surface, effectively reducing uneven wafer processing due to thermal gradients, thereby improving product yield and equipment performance consistency.

Excellent corrosion resistance: graphite heater for Hot Zone exhibits strong resistance to various corrosive gases and chemicals encountered in high-temperature semiconductor manufacturing processes. The natural inertness of graphite materials allows graphite heaters to maintain long-term stability in harsh environments, significantly reducing the risk of contamination and extending the service life of the equipment.

Excellent anti-oxidation performance: Compared with traditional graphite materials, Hot Zone graphite heater still has excellent anti-oxidation ability at high temperatures. This feature is crucial to prevent oxidative deterioration of the heater surface during high-temperature processing and avoid the generation of particle contamination in the processing chamber, ensuring the continued efficient operation of the equipment.

Ultra-high chemical purity: After strict processing, our graphite heater has reached an extremely high level of chemical purity, effectively preventing the introduction of harmful impurities into the semiconductor processing environment. This purity is critical to protecting the integrity of precision semiconductor materials and producing devices that meet expected electrical and optical properties.

High mechanical strength and stability: VeTekSemi's Hot Zone graphite heater has excellent mechanical strength and dimensional stability, maintaining structural integrity even under high-temperature operating conditions. Whether faced with frequent thermal cycles or heavy mechanical stress, graphite heaters for Hot Zone maintain their robustness and provide solid and reliable support for harsh semiconductor processing environments.

Besides, VeTeksemi also offers a variety of custom sizes and configurations of graphite heaters to meet the needs of different semiconductor manufacturing processes. such as sic ceramic coating graphite heater、VEECO MOCVD Heater, etc.  VeTek Semiconductor is committed to providing advanced and customizable technology and product solutions for the semiconductor industry. We sincerely hope to be your long-term partner in China.