silicon carbide ceramic coating heater

VeTek Semiconductor Silicon Carbide Ceramic Coating Heater is a heater designed for high temperature and harsh environments. It coats a layer of silicon carbon ceramic coating (SiC) on the surface of the heating element to give the equipment excellent heat resistance, corrosion resistance and thermal conductivity. 

Silicon carbide ceramic coating heater is mainly used in vacuum coating (evaporation) equipment. The commonly used methods are PCD (Plasma Chemical Drying) and PVD (Physical vapor deposition), which are widely used in semiconductor manufacturing and other high-demand industrial applications.

Combined with the high-performance coating design of Silicon Carbide Ceramic Coating Heater, it can provide an excellent heating solution for high-temperature processes.

Excellent thermal conductivity: SiC material has excellent thermal conductivity, ensuring that the heater can achieve uniform heat distribution in the working area and reduce temperature gradients.

Provide uniform heat distribution: Silicon Carbide Ceramic Coating Heater uses the high thermal conductivity of SiC material to achieve uniform temperature distribution throughout the heating area. This is critical to ensure uniform heat treatment of semiconductor wafers in various high-temperature processes such as rapid thermal processing (RTP), diffusion and oxidation, avoiding product defects caused by local overheating or uneven temperature.

High temperature tolerance: SiC coating enables the heater to withstand extremely high temperatures, typically up to 1600°C, suitable for various high-temperature processing processes.

Improve heat resistance: Because the coating can withstand extremely high temperatures, it performs well in processes that require long-term high-temperature operation. For example, in chemical vapor deposition (CVD) processes, Silicon Carbide Ceramic Coating Heater can ensure long-term stable operation of the equipment at high temperatures and maintain consistent heating performance, thereby improving process repeatability and reliability.

Chemical corrosion resistance: SiC coating has extremely high resistance to acid, alkali and corrosive gases, and can remain stable for a long time in a complex chemical atmosphere environment, extending the life of the equipment. 

Extending the life of the equipment: SiC coating has excellent oxidation resistance and corrosion resistance, and can effectively resist chemical erosion and oxidation at high temperatures. This is very critical in the semiconductor manufacturing process, especially in an environment that handles corrosive gases and chemicals. The protective effect of the coating can significantly extend the service life of the heater and reduce the frequency of equipment replacement and maintenance costs.

Basic physical properties of silicon carbide ceramic coating heater:

VeTek Semiconductor silicon carbide ceramic coating heater shops:

Overview of the VeTek semiconductor chip epitaxy industry chain: