China SiC Single Crystal Growth Process Spare Parts Manufacturer, Supplier, Factory
VeTek Semiconductor's product, the tantalum carbide (TaC) coating products for SiC Single Crystal Growth Process, addresses the challenges associated with the growth interface of silicon carbide (SiC) crystals, particularly the comprehensive defects that occur at the crystal's edge. By applying TaC coating, we aim to improve crystal growth quality and increase the effective area of the crystal's center, which is crucial for achieving fast and thick growth.
TaC coating is a core technological solution for growing high-quality SiC single crystal growth process. We have successfully developed a TaC coating technology using chemical vapor deposition (CVD), which has reached an internationally advanced level. TaC has exceptional properties, including a high melting point of up to 3880°C, excellent mechanical strength, hardness, and thermal shock resistance. It also exhibits good chemical inertness and thermal stability when exposed to high temperatures and substances such as ammonia, hydrogen, and silicon-containing steam.
VeTek Semiconductor's tantalum carbide (TaC) coating offers a solution to address the edge-related issues in SiC Single Crystal Growth Process, improving the quality and efficiency of the growth process. With our advanced TaC coating technology, we aim to support the development of the third-generation semiconductor industry and reduce dependence on imported key materials.
PVT method SiC Single crystal growth process spare parts:
TaC Coated Crucible, Seed Holder with TaC Coating, TaC coating Guide Ring are important parts in SiC and AIN single crystal furnace by PVT method.
Key Feature:
-High temperature resistance
-High purity, will not pollute SiC raw materials and SiC single crystals.
-Resistant to Al steam and N₂corrosion
-High eutectic temperature (with AlN) to shorten the crystal preparation cycle.
-Recyclable (up to 200h), it improves the sustainability and efficiency of the preparation of such single crystals.
TaC Coating Characteristics
Typical physical properties of Tac Coating
| Physical properties of TaC coating | |
| Density | 14.3 (g/cm³) |
| Specific emissivity | 0.3 |
| Thermal expansion coefficient | 6.3 10-6/K |
| Hardness (HK) | 2000 HK |
| Resistance | 1×10-5 Ohm*cm |
| Thermal stability | <2500℃ |
| Graphite size changes | -10~-20um |
| Coating thickness | ≥20um typical value (35um±10um) |
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Porous Graphite with TaC Coated
Porous Graphite with TaC Coated is an advanced semiconductor processing material provided by VeTek Semiconductor. Porous Graphite with TaC Coated combines the advantages of porous graphite and tantalum carbide (TaC) coating, with good thermal conductivity and gas permeability. VeTek Semiconductor is committed to providing quality products at competitive prices, and we look forward to being your long-term partner in China.
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Tantalum Carbide Coated Tube for Crystal Growth
VeTek Semiconductor is a leading Tantalum Carbide Coated Tube for Crystal Growth manufacturer and innovator in China.We have been specialized in ceramic coating for many years.Our products have a high purity and high temperature resistance.We look forward to becoming your long-term partner in China.
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TaC Coated Guide Ring
VeTek Semiconductor is a leading TaC Coated Guide Ring manufacturer and innovator in China.We have been specialized in ceramic coating for many years.TaC Coated Guide Ring are primarily used to guide and control airflow, enhancing the yield of single crystal growth. Welcome to inquiry us for further information.
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TaC Coated Graphite Wafer Carrier
VeTek Semiconductor is a leading TaC Coated Graphite Wafer Carrier manufacturer and innovator in China.We have been specialized in SiC and TaC coating for many years.Our TaC coated graphite wafer carrier has a higher temperature resistance and wear-resistant. We look forward to becoming your long-term partner in China.
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As a professional SiC Single Crystal Growth Process Spare Parts manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable SiC Single Crystal Growth Process Spare Parts made in China, you can leave us a message.
