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VeTek Semiconductor's product, the tantalum carbide (TaC) coating products for SiC Single Crystal Growth Process, addresses the challenges associated with the growth interface of silicon carbide (SiC) crystals, particularly the comprehensive defects that occur at the crystal's edge. By applying TaC coating, we aim to improve crystal growth quality and increase the effective area of the crystal's center, which is crucial for achieving fast and thick growth.

TaC coating is a core technological solution for growing high-quality SiC single crystal growth process. We have successfully developed a TaC coating technology using chemical vapor deposition (CVD), which has reached an internationally advanced level. TaC has exceptional properties, including a high melting point of up to 3880°C, excellent mechanical strength, hardness, and thermal shock resistance. It also exhibits good chemical inertness and thermal stability when exposed to high temperatures and substances such as ammonia, hydrogen, and silicon-containing steam.

VeTek Semiconductor's tantalum carbide (TaC) coating offers a solution to address the edge-related issues in SiC Single Crystal Growth Process, improving the quality and efficiency of the growth process. With our advanced TaC coating technology, we aim to support the development of the third-generation semiconductor industry and reduce dependence on imported key materials.

PVT method SiC Single crystal growth process spare parts:

TaC Coated Crucible, Seed Holder with TaC Coating, TaC coating Guide Ring are important parts in SiC and AIN single crystal furnace by PVT method.

Key Feature:

-High temperature resistance

-High purity, will not pollute SiC raw materials and SiC single crystals.

-Resistant to Al steam and N₂corrosion

-High eutectic temperature (with AlN) to shorten the crystal preparation cycle.

-Recyclable (up to 200h), it improves the sustainability and efficiency of the preparation of such single crystals.

TaC Coating Characteristics

Typical physical properties of Tac Coating

Physical properties of TaC coating
Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3 10-6/K
Hardness (HK)	2000 HK
Resistance	1×10-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)

Tantalum carbide coated diversion ring TaC Coating Guide Ring TaC Coating Ring Tantalum Carbide Coated Plate TaC coated chuck TaC coating Tube

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TaC coated ring for PVT growth of SiC single crystal

As one of the leading TaC coating product suppliers in China, VeTek Semiconductor is able to provide customers with high-quality TaC coating customized parts. TaC coated ring for PVT growth of SiC single crystal is one of VeTek Semiconductor's most outstanding and mature products. It plays an important role in the PVT growth of SiC crystal process and can help customers grow high-quality SiC crystals. Looking forward to your inquiry.

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Tantalum Carbide Coating Ring

VeTek semiconductor Tantalum Carbide Coating Ring is a indispensable component in the semiconductor industry, specifically in the etching of SiC wafers. Its combination of a graphite base and TaC coating ensures superior performance in high-temperature and chemically aggressive environments. With its enhanced thermal stability, corrosion resistance, and mechanical strength, the Tantalum Carbide Coated Ring helps semiconductor manufacturers achieve precision, reliability, and high-quality results in their production processes.

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TaC Coating Ring

TaC Coating Ring is a high-performance component designed for use in semiconductor processes, VeTek semiconductor TaC Coating Ring has high thermal stability, resistance to chemical corrosion, and excellent mechanical strength and is specifically used to hold and support SiC wafers during the etching process, where precise control and durability are essential for achieving high-quality wafers. we are looking forward to your further consultation.

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TaC Coating Crucible

As a professional TaC Coating Crucible Supplier and Manufacturer in China, VeTek Semiconductor's TaC Coating Crucible plays an irreplaceable role in the Single crystal growth process of semiconductors with its excellent thermal conductivity, outstanding chemical stability and enhanced corrosion resistance. Welcome your further inquiries.

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Tantalum Carbide coated guide ring

As a China leading TaC coating guide ring supplier and manufacturer, VeTek Semiconductor TaC coating guide ring is an important component used to guide and optimize the flow of reactive gases in the PVT (Physical Vapor Transport) method. It promotes the uniform deposition of SiC single crystals in the growth zone by adjusting the distribution and speed of the gas flow. VeTek Semiconductor is a leading manufacturer and supplier of TaC coating guide rings in China and even in the world, and we look forward to your consultation.

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TaC Coated ring

As a leading manufacturer and supplier of TaC Coated ring products in China, VeTek Semiconductor has been focusing on the R&D and production of various TaC coating products. As the main customers of TaC Coating products, European and American manufacturers have given high praise to our coating products. Welcome to your further consultation.

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As a professional SiC Single Crystal Growth Process Spare Parts manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable SiC Single Crystal Growth Process Spare Parts made in China, you can leave us a message.