Wafer Chuck
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Wafer Chuck

Vetek Semiconductor's wafer chuck play pivotal roles in semiconductor production, enabling fast, high-quality output. With in-house manufacturing, competitive pricing, and robust R&D support, Vetek Semiconductor excels in OEM/ODM services for precision components.Looking forward to your inquiry.

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Product Description

As the professional manufacturer, Vetek Semiconductor would like to provide you SiC coated Wafer Chuck.

Vetek Semiconductor holds ISO9001 certification covering the development and manufacture of a full range of components for semiconductor devices. These components include process equipment, deposition equipment, inspection equipment, semiconductor wafer chucks, flow meters, chambers, pressure curing systems such as plates, blocks, shafts, rollers, etc. 5. As a partner of Aixtron, Veeco(the world's top ten equipment manufacturers), Vetek Semiconductor provides semiconductor precision components to top semiconductor equipment manufacturers in the United States, the world's largest semiconductor market.

Vetek Semiconductor's wafer chuck is a phased component of wafer final inspection equipment in semiconductor wafer production process equipment. Through the systematic quality control and inspection system, fast, high quality and competitive production are achieved. Cost optimisation is achieved through strategic integration of our production infrastructure and partnerships with domestic and international specialist manufacturers for materials, components, modules and equipment.

Vetek Semiconductor's semiconductor wafer chuck are used in wafer detection equipment, using high-precision machining methods and design technology to ensure that the flatness of the vacuum wafer chuck is below 3 μm. This meticulous approach guarantees excellent performance and accuracy in wafer inspection.

Vetek Semiconductor Core advantage:

1. Manufacturing in our own factory

2. Direct production/distribution at honest prices.

3. The internal R & D center provides quality improvement and development support, and actively participates in enterprise and national research support projects for parts localization.

4.OEM / ODM


Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property Typical Value
Crystal Structure FCC β phase polycrystalline, mainly (111) oriented
Density 3.21 g/cm³
Hardness 2500 Vickers hardness(500g load)
Grain SiZe 2~10μm
Chemical Purity 99.99995%
Heat Capacity 640 J·kg-1·K-1
Sublimation Temperature 2700℃
Flexural Strength 415 MPa RT 4-point
Young' s Modulus 430 Gpa 4pt bend, 1300℃
Thermal Conductivity 300W·m-1·K-1
Thermal Expansion(CTE) 4.5×10-6K-1


Production shops:


Overview of the semiconductor chip epitaxy industry chain:


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