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China Silicon Carbide Ceramics Manufacturer, Supplier, Factory

VeTek Semiconductor is your innovative partner in the field of semiconductor processing. With our extensive portfolio of semiconductor-grade Silicon Carbide Ceramics material combinations, component manufacturing capabilities, and application engineering services, we can help you overcome significant challenges. Engineering technical Silicon Carbide Ceramics are widely applied in the semiconductor industry due to their exceptional material performance. VeTek Semiconductor's ultra-pure Silicon Carbide Ceramics are frequently used throughout the entire cycle of semiconductor manufacturing and processing.

DIFFUSION & LPCVD PROCESSING

VeTek Semiconductor provides engineered ceramics components specifically designed for batch diffusion and LPCVD requirements including:

• Baffles & holders
• Injectors
• Liners & process tubes
• Silicon Carbide Cantilever Paddles
• Wafer boats and pedestals

SiC Cantilever Paddle SiC Process Tubes Silicon Carbide Process Tube SiC vertical wafer boat SiC horizontal wafer boat SiC horizontals quare wafer boat SiC LPCVD wafer boat SiC horizontal plate boat SiC Ceramic Seal Ring

ETCH PROCESS COMPONENTS

Minimize contamination and unscheduled maintenance with high- purity components engineered for the rigors of plasma etch processing, including:

Focus rings

Nozzles

Shields

Showerheads

Windows / Lids

Other custom components

RAPID THERMAL PROCESSING & EPITAXIAL PROCESS COMPONENTS

VeTek Semiconductor provides advanced material components tailored for high-temperature thermal processing applications in the semiconductor industry. These applications encompass RTP, Epi processes, diffusion, oxidation, and annealing. Our technical ceramics are designed to withstand thermal shocks, delivering reliable and consistent performance. With VeTek Semiconductor's components, semiconductor manufacturers can achieve efficient and high-quality thermal processing, contributing to the overall success of semiconductor production.

• Diffusers

• Insulators

• Susceptors

• Other custom thermal components

Physical properties of Recrystallized Silicon Carbide
Property	Typical Value
Working temperature (°C)	1600°C (with oxygen), 1700°C (reducing environment)
SiC / SiC content	> 99.96%
Si / Free Si content	< 0.1%
Bulk density	2.60-2.70 g/cm3
Apparent porosity	< 16%
Compression strength	> 600 MPa
Cold bending strength	80-90 MPa (20°C)
Hot bending strength	90-100 MPa (1400°C)
Thermal expansion @1500°C	4.70 10-6/°C
Thermal conductivity @1200°C	23 W/m•K
Elastic modulus	240 GPa
Thermal shock resistance	Extremely good

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SiC Ceramics Wafer Boat

VeTek semiconductor is a leading SiC Ceramics Wafer Boat supplier, manufacturer and factory in China. Our SiC Ceramics Wafer Boat is a vital component in advanced wafer handling processes, catering to the photovoltaic, electronics, and semiconductor industries. Looking forward to your consultation.

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Silicon Carbide Ceramic Wafer Boat

VeTek Semiconductor specializes in providing high-quality wafer boats, pedestals and custom wafer carriers in vertical/column and horizontal configurations to meet various semiconductor process requirements. As a leading manufacturer and supplier of silicon carbide coating films, our semiconductor wafer boats are favored by the European and American markets for their high cost-effectiveness and excellent quality, and are widely used in advanced semiconductor manufacturing processes. VeTek Semiconductor is committed to establishing long-term and stable cooperative relationships with global customers, and especially hopes to become your reliable semiconductor process partner in China.

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Silicon Carbide (SiC) Cantilever Paddle

The role of Silicon Carbide (SiC) Cantilever Paddle in the semiconductor industry is to support and transport wafers. In high-temperature processes such as diffusion and oxidation, SiC cantilever paddle can stably carry wafer boats and wafers without deformation or damage due to high temperature, ensuring the smooth progress of the process. Making diffusion, oxidation and other processes more uniform is crucial to improving the consistency and yield of wafer processing. VeTek Semiconductor uses advanced technology to build SiC cantilever paddle with high-purity silicon carbide to ensure that wafers will not be contaminated. VeTek Semiconductor looks forward to long-term cooperation with you on Silicon Carbide (SiC) Cantilever Paddle products.

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Silicon Carbide wafer Carrier

As a professional Silicon Carbide wafer carrier supplier in China, VeTek Semiconductor SiC wafer carrier is a tool specially used for handling and processing semiconductor wafers, which plays an irreplaceable role in the semiconductor wafer process. Welcome to your further consultation.

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Silicon Pedestal

VeTek Semiconductor Silicon Pedestal is a key component in semiconductor diffusion and oxidation processes. As a dedicated platform for carrying silicon boats in high-temperature furnaces, the Silicon Pedestal has many unique advantages, including improved temperature uniformity, optimized wafer quality, and enhanced performance of semiconductor devices. For more product information, please feel free to contact us.

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SiC Ceramic Seal Ring

As a large-scale factory and supplier of SiC Ceramic Seal Ring products in China, VeTek Semiconductor SiC Ceramic Seal Ring has a wide range of applications in the industrial field due to its excellent thermal conductivity, outstanding chemical and corrosion resistance, and high strength and stiffness. Welcome your further inquiries.

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As a professional Silicon Carbide Ceramics manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Silicon Carbide Ceramics made in China, you can leave us a message.