China Silicon Carbide Ceramics Manufacturer, Supplier, Factory
VeTek Semiconductor is your innovative partner in the field of semiconductor processing. With our extensive portfolio of semiconductor-grade Silicon Carbide Ceramics material combinations, component manufacturing capabilities, and application engineering services, we can help you overcome significant challenges. Engineering technical Silicon Carbide Ceramics are widely applied in the semiconductor industry due to their exceptional material performance. VeTek Semiconductor's ultra-pure Silicon Carbide Ceramics are frequently used throughout the entire cycle of semiconductor manufacturing and processing.
DIFFUSION & LPCVD PROCESSING
VeTek Semiconductor provides engineered ceramics components specifically designed for batch diffusion and LPCVD requirements including:
• Baffles & holders
• Injectors
• Liners & process tubes
• Silicon Carbide Cantilever Paddles
• Wafer boats and pedestals
SiC Cantilever Paddle 
SiC Process Tubes 
Silicon Carbide Process Tube 
SiC vertical wafer boat 
SiC horizontal wafer boat 
SiC horizontals quare wafer boat 
SiC LPCVD wafer boat 
SiC horizontal plate boat 
SiC round wafer boat
ETCH PROCESS COMPONENTS
Minimize contamination and unscheduled maintenance with high- purity components engineered for the rigors of plasma etch processing, including:
Focus rings
Nozzles
Shields
Showerheads
Windows / Lids
Other custom components
RAPID THERMAL PROCESSING & EPITAXIAL PROCESS COMPONENTS
VeTek Semiconductor provides advanced material components tailored for high-temperature thermal processing applications in the semiconductor industry. These applications encompass RTP, Epi processes, diffusion, oxidation, and annealing. Our technical ceramics are designed to withstand thermal shocks, delivering reliable and consistent performance. With VeTek Semiconductor's components, semiconductor manufacturers can achieve efficient and high-quality thermal processing, contributing to the overall success of semiconductor production.
• Diffusers
• Insulators
• Susceptors
• Other custom thermal components
| Physical properties of Recrystallized Silicon Carbide | |
| Property | Typical Value |
| Working temperature (°C) | 1600°C (with oxygen), 1700°C (reducing environment) |
| SiC / SiC content | > 99.96% |
| Si / Free Si content | < 0.1% |
| Bulk density | 2.60-2.70 g/cm3 |
| Apparent porosity | < 16% |
| Compression strength | > 600 MPa |
| Cold bending strength | 80-90 MPa (20°C) |
| Hot bending strength | 90-100 MPa (1400°C) |
| Thermal expansion @1500°C | 4.70 10-6/°C |
| Thermal conductivity @1200°C | 23 W/m•K |
| Elastic modulus | 240 GPa |
| Thermal shock resistance | Extremely good |
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Silicon Carbide Wafer Boat for Horizontal Furnace
VeTek Semiconductor is a professional manufacturer and supplier in China for silicon carbide wafer boat for horizontal furnace, with years of experience in R&D and production, can control the quality well and offer a competitive price. You can rest assured to buy the silicon carbide wafer boat for horizontal furnace from us.
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SiC Coated Silicon Carbide Wafer Boat
VeTek Semiconductor is professional manufacturer and supplier in China for SiC coated silicon carbide wafer boat, with years of experience in R&D and production, can control the quality well and offer a competitive price. Welcome for visiting our factory and have further discussion on cooperation.
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Silicon Carbide Cantilever Paddle
VeTek Semiconductor's Silicon Carbide Cantilever Paddle is an important component in the semiconductor manufacturing process, especially suitable for diffusion furnaces or LPCVD furnaces in high-temperature processes such as diffusion and RTP. Our Silicon Carbide Cantilever Paddle is carefully designed and manufactured with excellent high-temperature resistance and mechanical strength, and can safely and reliably transport wafers to the process tube under harsh process conditions for various high-temperature processes such as diffusion and RTP. We look forward to becoming your long-term partner in China.
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High Pure Silicon Carbide Wafer Carrier
VeTek Semiconductor High Pure Silicon Carbide Wafer Carrier are important components in semiconductor processing, designed to safely hold and transport delicate silicon wafers, playing a key role in all stages of manufacturing. VeTek Semiconductor's High Pure Silicon Carbide Wafer Carrier are carefully designed and manufactured to ensure excellent performance and reliability. VeTek Semiconductor is committed to providing quality products at competitive prices, and we look forward to being your long-term partner in China.
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Silicon Carbide Wafer Boat
VeTek Semiconductor's high-purity Silicon Carbide Wafer Boat is made of extremely pure silicon carbide material with excellent thermal stability, mechanical strength and chemical resistance. High-purity Silicon Carbide Wafer Boat is used in hot zone applications in semiconductor manufacturing, especially in high-temperature environments, and plays an important role in protecting wafers, transporting materials and maintaining stable processes. VeTek Semiconductor will continue to work hard to innovate and improve the performance of high-purity Silicon Carbide Wafer Boat to meet the evolving needs of semiconductor manufacturing. We look forward to becoming your long-term partner in China.
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Ultra Pure Silicon Carbide Powder for Crystal Growth
VeTek Semiconductor is a professional manufacturer and supplier, dedicated to providing high-quality Ultra Pure Silicon Carbide Powder for Crystal Growth. With a purity of up to 99.999% wt and extremely low impurity levels of nitrogen, boron, aluminum, and other contaminants, it is specifically designed to enhance the semi-insulating properties of high-purity silicon carbide. Welcome to inquire and cooperate with us!
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As a professional Silicon Carbide Ceramics manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Silicon Carbide Ceramics made in China, you can leave us a message.
