Silicon Carbide Ceramic Coating

Vetek Semiconductor Silicon Carbide Ceramic Coating is a high-performance protective coating made of extremely hard and wear-resistant silicon carbide (SiC) material, which provides excellent chemical corrosion resistance and high temperature stability. These properties are crucial in semiconductor production, so Silicon Carbide Ceramic Coating is widely used on key components of semiconductor manufacturing equipment.

The specific role played by Vetek Semiconductor Silicon Carbide Ceramic Coating in semiconductor production is as follows:

Enhance equipment durability: Silicon Carbide Ceramic Coating provides excellent surface protection for semiconductor manufacturing equipment with its extremely high hardness and wear resistance. Especially in high-temperature, highly corrosive process environments, such as chemical vapor deposition (CVD) and plasma etching, silicon carbide ceramic coating can effectively prevent damage to the equipment surface due to chemical erosion or physical wear, thereby significantly extending the service life of the equipment and reducing downtime caused by frequent replacement and maintenance.

Improve process purity: In the semiconductor manufacturing process, any tiny contamination may cause product defects. The chemical inertness of silicon carbide ceramic coating allows it to remain stable under extreme conditions, prevent the material from releasing particles or impurities, and ensure the purity of the environment during the process. This is especially important for manufacturing steps that require high precision and high cleanliness, such as PECVD and ion implantation.

Optimize thermal management: In high-temperature semiconductor processing, such as rapid thermal processing (RTP) and oxidation processes, the high thermal conductivity of Silicon Carbide Ceramic Coating enables a uniform temperature distribution inside the equipment. This helps reduce thermal stress and material deformation caused by temperature fluctuations, thereby improving product manufacturing accuracy and consistency.

Support complex process environment: In processes that require complex atmosphere control, such as ICP etching and PSS etching processes, the stability and oxidation resistance of the silicon carbide ceramic coating heater ensure the stable performance of the equipment in long-term operation, reducing the risk of material degradation or equipment damage due to environmental changes.

Vetek Semiconductor focuses on manufacturing and supplying high-performance Silicon Carbide Ceramic Coating, and is committed to providing advanced technology and product solutions for the semiconductor industry. We sincerely hope to be your long-term partner in China.

Basic physical properties of Silicon Carbide Ceramic Coating:

VeTek Semiconductor Silicon Carbide Ceramic Coating shops:

Overview of the semiconductor chip epitaxy industry chain: