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China Tantalum Carbide Coating Manufacturer, Supplier, Factory
VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.
The main products are Tantalum Carbide coating defector ring, TaC coated diversion ring, TaC coated halfmoon parts, Tantalum Carbide Coated Planetary Rotation Disk (Aixtron G10) , TaC Coated Crucible; TaC Coated Rings; TaC Coated Porous Graphite; Tantalum Carbide Coating Graphite Susceptor; TaC Coated Guide Ring; TaC Tantalum Carbide Coated Plate; TaC Coated Wafer Susceptor; TaC Coating Ring; TaC Coating Graphite Cover; TaC Coated Chunk etc., the purity is below 5ppm, can meet customer requirements.
TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:
The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.
Key Features:
● Temperature stability
● Ultra high purity
● Resistance to H2, NH3, SiH4,Si
● Resistance to thermal stock
● Strong adhesion to graphite
● Conformal coating coverage
● Size up to 750 mm diameter(The only manufacturer in China reaches this size)
Applications:
● Inductive heating susceptor
● Resistive heating element
● Heat shield
Tantalum carbide (TaC) coating on a microscopic cross-section:
Parameter of VeTek Semiconductor Tantalum Carbide Coating:
| Physical properties of TaC coating | |
| Density | 14.3 (g/cm³) |
| Specific emissivity | 0.3 |
| Thermal expansion coefficient | 6.3 10-6/K |
| Hardness (HK) | 2000 HK |
| Resistance | 1×10-5 Ohm*cm |
| Thermal stability | <2500℃ |
| Graphite size changes | -10~-20um |
| Coating thickness | ≥20um typical value (35um±10um) |
TaC coating EDX data：
TaC coating crystal structure data:
| Element | Atomic percent | |||
| Pt. 1 | Pt. 2 | Pt. 3 | Average | |
| C K | 52.10 | 57.41 | 52.37 | 53.96 |
| Ta M | 47.90 | 42.59 | 47.63 | 46.04 |
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TaC coated ring for PVT growth of SiC single crystal
As one of the leading TaC coating product suppliers in China, VeTek Semiconductor is able to provide customers with high-quality TaC coating customized parts. TaC coated ring for PVT growth of SiC single crystal is one of VeTek Semiconductor's most outstanding and mature products. It plays an important role in the PVT growth of SiC crystal process and can help customers grow high-quality SiC crystals. Looking forward to your inquiry.
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CVD TaC coated three-petal guide ring
VeTek Semiconductor has experienced many years of technological development and has mastered the leading process technology of CVD TaC coating. CVD TaC coated three-petal guide ring is one of VeTek Semiconductor's most mature CVD TaC coating products and is an important component for preparing SiC crystals by PVT method. With the help of VeTek Semiconductor, I believe your SiC crystal production will be smoother and more efficient.
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Tantalum Carbide Coating Ring
VeTek semiconductor Tantalum Carbide Coating Ring is a indispensable component in the semiconductor industry, specifically in the etching of SiC wafers. Its combination of a graphite base and TaC coating ensures superior performance in high-temperature and chemically aggressive environments. With its enhanced thermal stability, corrosion resistance, and mechanical strength, the Tantalum Carbide Coated Ring helps semiconductor manufacturers achieve precision, reliability, and high-quality results in their production processes.
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TaC Coating Ring
TaC Coating Ring is a high-performance component designed for use in semiconductor processes, VeTek semiconductor TaC Coating Ring has high thermal stability, resistance to chemical corrosion, and excellent mechanical strength and is specifically used to hold and support SiC wafers during the etching process, where precise control and durability are essential for achieving high-quality wafers. we are looking forward to your further consultation.
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TaC Coating Crucible
As a professional TaC Coating Crucible Supplier and Manufacturer in China, VeTek Semiconductor's TaC Coating Crucible plays an irreplaceable role in the Single crystal growth process of semiconductors with its excellent thermal conductivity, outstanding chemical stability and enhanced corrosion resistance. Welcome your further inquiries.
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Tantalum Carbide coated guide ring
As a China leading TaC coating guide ring supplier and manufacturer, VeTek Semiconductor TaC coating guide ring is an important component used to guide and optimize the flow of reactive gases in the PVT (Physical Vapor Transport) method. It promotes the uniform deposition of SiC single crystals in the growth zone by adjusting the distribution and speed of the gas flow. VeTek Semiconductor is a leading manufacturer and supplier of TaC coating guide rings in China and even in the world, and we look forward to your consultation.
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As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
