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China Silicon Carbide Coating Manufacturer, Supplier, Factory

VeTek Semiconductor specializes in the production of ultra pure Silicon Carbide Coating products, these coatings are designed to be applied to purified graphite, ceramics, and refractory metal components.

Our high purity coatings are primarily targeted for use in the semiconductor and electronics industries. They serve as a protective layer for wafer carriers, susceptors, and heating elements, safeguarding them from corrosive and reactive environments encountered in processes such as MOCVD and EPI. These processes are integral to wafer processing and device manufacturing. Additionally, our coatings are well-suited for applications in vacuum furnaces and sample heating, where high vacuum, reactive, and oxygen environments are encountered.

At VeTek Semiconductor, we offer a comprehensive solution with our advanced machine shop capabilities. This enables us to manufacture the base components using graphite, ceramics, or refractory metals and apply the SiC or TaC ceramic coatings in-house. We also provide coating services for customer-supplied parts, ensuring flexibility to meet diverse needs.

Our Silicon Carbide Coating products are widely used in Si epitaxy, SiC epitaxy, MOCVD system, RTP/RTA process, etching process, ICP/PSS etching process, process of various LED types, including blue and green LED, UV LED and deep-UV LED etc.,which is adapted to equipment from LPE, Aixtron, Veeco, Nuflare, TEL, ASM, Annealsys, TSI and so on.

Reactor parts we can do:

Silicon Carbide Coating several unique advantages:

Silicon Carbide Coating several unique advantages

VeTek Semiconductor Silicon Carbide Coating Parameter

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
SiC coating Density	3.21 g/cm³
SiC coatingHardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10-6K^-1

CVD SIC FILM CRYSTAL STRUCTURE

Silicon Carbide coated Epi susceptor SiC Coating Wafer Carrier SiC coated Satellite cover for MOCVD CVD SiC Coating Wafer Epi Susceptor CVD SiC coating Heating Element Aixtron Satellite wafer carrier SiC Coating Epi susceptor SiC coating halfmoon graphite parts

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SiC Coated ICP Etching Carrier

VeTek Semiconductor's SiC Coated ICP Etching Carrier is designed for the most demanding epitaxy equipment applications. Made of high-quality ultra-pure graphite material, our SiC Coated ICP Etching Carrier has a highly flat surface and excellent corrosion resistance to withstand the harsh conditions during handling. The high thermal conductivity of the SiC coated carrier ensures even heat distribution for excellent etching results. VeTek Semiconductor has established long-term cooperative relationships with many semiconductor manufacturers.We also look forward to building a long-term partnership with you.

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PSS Etching Carrier Plate for Semiconductor

VeTek Semiconductor's PSS Etching Carrier Plate for Semiconductor is a high-quality, ultra-pure graphite carrier designed for wafer handling processes. Our carriers have excellent performance and can perform well in harsh environments, high temperatures and harsh chemical cleaning conditions. Our products are widely used in many European and American markets, and we look forward to becoming your long-term partner in China.You are welcome to come to China to visit our factory and learn more about our technology and products.

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Rapid Thermal Annealing Susceptor

VeTek Semiconductor is a leading Rapid Thermal Annealing Susceptor manufacturer and supplier in China, focusing on providing high-performance solutions for the semiconductor industry. We have many years of deep technical accumulation in the field of SiC coating materials. Our Rapid Thermal Annealing Susceptor has excellent high temperature resistance and excellent thermal conductivity to meet the needs of wafer epitaxial manufacturing. You are welcome to visit our factory in China to learn more about our technology and products.

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Silicon-based GaN Epitaxial Susceptor

Silicon-based GaN Epitaxial Susceptor is the core component required for GaN Epitaxial production. VeTek Semiconductor, as a professional manufacturer and supplier, is committed to providing high-quality Silicon-based GaN Epitaxial Susceptor. Our Silicon-based GaN Epitaxial Susceptor is designed for Silicon-based GaN Epitaxial reactor systems and features high purity, excellent high temperature resistance, and corrosion resistance. VeTek Semiconductor is committed to providing quality products at competitive prices, welcome to inquire.

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8 Inch Halfmoon Part for LPE Reactor

VeTek Semiconductor is a leading semiconductor equipment manufacturer in China, focusing on the R&D and production of 8 Inch Halfmoon Part for LPE Reactor. We have accumulated rich experience over the years, especially in SiC coating materials, and are committed to providing efficient solutions tailored for LPE epitaxial reactors. Our 8 Inch Halfmoon Part for LPE Reactor has excellent performance and compatibility, and is an indispensable key component in epitaxial manufacturing. Welcome your inquiry to learn more about our products.

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SiC Coated Pancake Susceptor for LPE PE3061S 6'' Wafers

SiC Coated Pancake Susceptor for LPE PE3061S 6'' wafers is one of the core components used in 6'' wafers epitaxial wafer processing. VeTek Semiconductor is currently a leading manufacturer and supplier of SiC Coated Pancake Susceptor for LPE PE3061S 6'' wafers in China. The SiC Coated Pancake Susceptor it provides has excellent characteristics such as high corrosion resistance, good thermal conductivity, and good uniformity. Looking forward to your inquiry.

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As a professional Silicon Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Silicon Carbide Coating made in China, you can leave us a message.