Aixtron G5 MOCVD Susceptors
VeTek Semiconductor is a leading Aixtron G5 MOCVD Susceptors manufacturer and innovator in China.We have been specialized in SiC coating material for many years.We offer a Aixtron G5 MOCVD Susceptors designed specifically for Aixtron G5 MOCVD reactor. This Aixtron G5 MOCVD Susceptors kit is a versatile and efficient solution for semiconductor manufacturing with its optimal size, compatibility, and high productivity.Welcome to inquiry us.
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Product Description
As the professional manufacturer, VeTek Semiconductor would like to provide you Aixtron G5 MOCVD Susceptors like SiC coated graphite parts, TaC coated graphite parts, solid SiC/CVD SiC,quartz parts.Welcome to inquiry us.
Aixtron G5 is a deposition system for compound semiconductors. AIX G5 MOCVD uses a production customer proven AIXTRON planetary reactor platform with a fully automated cartridge (C2C) wafer transfer system. Achieved the industry's largest single cavity size (8 x 6 inches) and largest production capacity. It offers flexible 6 - and 4-inch configurations designed to minimize production costs while maintaining excellent product quality. The warm wall planetary CVD system is characterized by the growth of multiple plates in a single furnace, and the output efficiency is high. VeTek Semiconductor offers a complete set of accessories for the Aixtron G5 MOCVD system,Aixtron G5 MOCVD Susceptors consists of these accessories:
| Thrust Piece,Anti-Rotate | Distribution Ring | Ceiling | Holder, Ceiling, Insulated | Cover Plate,Outer |
| Cover Plate,Inner | Cover Ring | Disc | Pulldown Cover Disc | Pin |
| Pin-washer | Planetary Disc | Collector Inlet Ring Gap | Exhaust Collector Upper | Shutter |
| Supporting Ring | Support Tube |
Basic physical properties of CVD SiC coating:
| Basic physical properties of CVD SiC coating | |
| Property | Typical Value |
| Crystal Structure | FCC β phase polycrystalline, mainly (111) oriented |
| Density | 3.21 g/cm³ |
| Hardness | 2500 Vickers hardness（500g load） |
| Grain SiZe | 2~10μm |
| Chemical Purity | 99.99995% |
| Heat Capacity | 640 J·kg-1·K-1 |
| Sublimation Temperature | 2700℃ |
| Flexural Strength | 415 MPa RT 4-point |
| Young' s Modulus | 430 Gpa 4pt bend, 1300℃ |
| Thermal Conductivity | 300W·m-1·K-1 |
| Thermal Expansion(CTE) | 4.5×10-6K-1 |
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Hot Tags: Aixtron G5 MOCVD Susceptors, China, Manufacturer, Supplier, Factory, Customized, Buy, Advanced, Durable, Made in China
Related Category
Solid Silicon Carbide
Silicon Epitaxy
Silicon Carbide Epitaxy
MOCVD Technology
RTA/RTP Process
ICP/PSS Etching Process
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