SiC Coating Wafer Carrier

Vetek Semiconductor specializes in manufacturing and supplying high-performance SiC coating wafer carriers and is committed to providing advanced technology and product solutions to the semiconductor industry.

In semiconductor manufacturing,Vetek Semiconductor’s SiC coating wafer carrier is a key component in chemical vapor deposition (CVD) equipment, especially in metal organic chemical vapor deposition (MOCVD) equipment. Its main task is to support and heat the single crystal substrate so that the epitaxial layer can grow uniformly. This is essential for manufacturing high-quality semiconductor devices.

The corrosion resistance of SiC coating is very good, which can effectively protect the graphite base from corrosive gases. This is especially important in high temperature and corrosive environments. In addition, the thermal conductivity of SiC material is also very excellent, which can evenly conduct heat and ensure uniform temperature distribution, thereby improving the growth quality of epitaxial materials.

SiC coating maintains chemical stability in high temperature and corrosive atmosphere, avoiding the problem of coating failure. More importantly, the thermal expansion coefficient of SiC is similar to that of graphite, which can avoid the problem of coating shedding due to thermal expansion and contraction, and ensure the long-term stability and reliability of the coating.

Basic physical properties of SiC Coating Wafer Carrier:

Production Shop:

Overview of the semiconductor chip epitaxy industry chain: