SiC Coating Epi susceptor

Vetek Semiconductor is professional manufacturer in China for SiC Coating Epi Susceptor.

VeTek Semiconductor's SiC Coating Epi Susceptor is made of graphite and silicon carbide. This SiC Coating product uses imported graphite, which has more stable performance and long service life, and is highly praised by our European and American customers. At the same time, the concentration of SiC Coating Epi susceptor is below 5ppm, and the uniformity is very good. After continuous technological upgrades, VeTek Semiconductor uses a new process to form a good match between the thermal expansion coefficient of SiC Coating and graphite materials.

SiC Coating Epi Susceptor is specially used in high temperature and corrosive environments in semiconductor equipment. SiC Coating Epi susceptor is commonly used in equipment such as AIXTRON, especially in the deep ultraviolet epitaxy (DUV Epitaxy) process, playing a key role.

In the deep ultraviolet epitaxy (DUV Epitaxy) process, combined with the excellent high temperature resistance and corrosion resistance of SiC Coating Epi Susceptor, SiC Coating Epi Susceptor is usually installed around the reaction chamber in the AIXTRON equipment as a carrier during the epitaxy process from damaging or contaminating the equipment.

This SiC coating Epi susceptor is designed for deep ultraviolet epitaxy. We strictly control the silicon carbide coatin, incorporate buffer layer technology to reduce issues caused by differences in thermal expansion coefficients between graphite and silicon carbide coatings, thus extending the lifespan of the product. Currently, our product has received numerous accolades and is recognized as one of the best in the domestic market.

As an industry leader in SiC Coating products, VeTek Semiconductor supports product customization services and satisfactory product prices, and looks forward to your further consultation.

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