China SiC Epitaxy Process Manufacturer, Supplier, Factory

VeTek Semiconductor's unique carbide coatings provide superior protection for graphite parts in the SiC Epitaxy Process for the processing of demanding semiconductor and composite semiconductor materials. The result is extended graphite component life, preservation of reaction stoichiometry, inhibition of impurity migration to epitaxy and crystal growth applications, resulting in increased yield and quality.

Our tantalum carbide (TaC) coatings protect critical furnace and reactor components at high temperatures (up to 2200°C) from hot ammonia, hydrogen, silicon vapors and molten metals. VeTek Semiconductor has a wide range of graphite processing and measurement capabilities to meet your customized requirements, so we can offer a fee-paying coating or full-service, with our team of expert engineers ready to design the right solution for you and your specific application.

Compound semiconductor crystals

VeTek Semiconductor can provide special TaC coatings for various components and carriers. Through VeTek Semiconductor's industry leading coating process,the TaC coating can obtain high purity, high temperature stablity and high chemical resistance,thereby improving the product quality of crystal TaC/GaN)and EPl layers, and extending the lifetime of critical reactor components.

Thermal insulators

SiC, GaN and AlN crystal growth components including crucibles, seed holders, deflectors and filters. Industrial assemblies including resistive heating elements, nozzles, shielding rings and brazing fixtures, GaN and SiC epitaxial CVD reactor components including wafer carriers, satellite trays, shower heads, caps and pedestals, MOCVD components.

Purpose:

● LED(Light Emitting Diode) Wafer Carrier

● ALD(Semiconductor) Susceptor

● EPI Susceptor(SiC Epitaxy Process)

CVD TaC coating planetary SiC epitaxial susceptor TaC Coated Ring for SiC Epitaxial Reactor TaC Coated Three-petal Ring Tantalum Carbide Coated Halfmoon Part for LPE

Comparision of SiC Coating and TaC Coating:

	SiC	TaC
Main Features	Ultra high purity,Excellent Plasma resistance	Excellent high temperature stability(high temperature process conformance)
Purity	>99.9999%	>99.9999%
Density (g/cm³)	3.21	15
Hardness (kg/mm²)	2900-3300	6.7-7.2
Resistivity [Ωcm]	0.1-15,000	<1
Thermal conductivity (W/m-K)	200-360	22
Coefficient of thermal expansion(10^-6/℃)	4.5-5	6.3
Application	Semiconductor Equipment Ceramic jig(Focus Ring, Shower Head, Dummy Wafer)	SiC Single crystal growth, Epi, UV LED Equipment parts

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TaC Coating Plate

VeTek Semiconductor's TaC Coating Plate is a remarkable product that offers exceptional features and advantages. Designed with precision and engineered to perfection, our TaC Coating Plate is specifically tailored for various applications in silicon carbide (SiC) single crystal growth processes.The TaC Coating Plate's precise dimensions and robust construction make it easy to integrate into existing systems, ensuring seamless compatibility and efficient operation. Its reliable performance and high-quality coating contribute to consistent and uniform results in SiC crystal growth applications.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

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CVD TaC Coating Cover

CVD TaC coating cover provided by VeTek Semiconductor is a highly specialized component designed specifically for demanding applications. With its advanced features and exceptional performance, our CVD TaC coating cover offers several key advantages.Our CVD TaC coating cover provides the necessary protection and performance required for success.We looking forward to exploring potential cooperation with you!

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TaC Coating Planetary Susceptor

VeTek Semiconductor'TaC Coating Planetary Susceptor is an exceptional product for Aixtron epitaxy equipment. The robust TaC coating provides excellent high-temperature resistance and chemical inertness. This unique combination ensures reliable performance and long service life, even in demanding environments. VeTek is committed to providing high-quality products and serving as a long-term partner in the Chinese market with competitive pricing.

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TaC Coating Pedestal Support Plate

VeTek Semiconductor's TaC Coating Pedestal Support Plate is a high-precision product designed to meet the specific requirements of semiconductor epitaxy processes. With its TaC coating, high-temperature resistance, and chemical inertness, our product empowers you to produce high-quality EPI layers with high quality. We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

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TaC Coating Chuck

VeTek Semiconductor's TaC Coating Chuck features a high-quality TaC coating,known for its outstanding high-temperature resistance and chemical inertness, particularly in silicon carbide (SiC) epitaxy(EPI) processes. With its exceptional features and superior performance, our TaC Coating Chuck offers several key advantages.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

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LPE SiC EPI Halfmoon

LPE SiC Epi Halfmoon by VeTek Semiconductor, a revolutionary product designed to elevate LPE reactor SiC epitaxy processes. This cutting-edge solution boasts several key features that ensure superior performance and efficiency throughout your manufacturing operations.Looking forward to setting up long term cooperation with you.

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As a professional SiC Epitaxy Process manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable SiC Epitaxy Process made in China, you can leave us a message.