Tantalum Carbide Coated Halfmoon Part for LPE

VeTek Semiconductor is a large-scale Tantalum Carbide Coated Halfmoon Part for LPE manufacturer and innovator in China.We have been specialized in TaC coating for many years.Our products can withstand temperatures above 2000 degrees Celsius, prolong the lifespan of consumables.We look forward to becoming your long-term partner in China.

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Product Description

As the professional manufacturer, VeTek Semiconductor would like to provide you high quality Tantalum Carbide Coated Halfmoon Part for LPE.

VeTek Semiconductor is a professional leader China SiC, TaC coating, solid SiC manufacturer with high quality and reasonable price.Our Tantalum Carbide Coated Halfmoon Part for LPE are used in the reaction chamber of horizontal and vertical epitaxy equipment to carry substrate, temperature control, heat preservation, ventilation, protection and other functions, so as to jointly control the thickness, doping, defects and other material characteristics of SiC epitaxy layer growth inside the reaction chamber.

VeTek Semiconductor related products: upper halfmoon, lower halfmoon, protective cover, insulation cover, process air diversion interface. Our company is committed to providing customers with a full range of reaction chamber SiC coated and TaC coated component solutions.

Product parameter of the Tantalum Carbide Coated Halfmoon Part for LPE

Physical properties of TaC coating
Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3 10-6/K
Hardness (HK)	2000 HK
Resistance	1×10-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)