TaC Coating Chuck

TaC (tantalum carbide) is a material commonly used to coat the surface of internal parts of epitaxial equipment. It has the following characteristics:

● Excellent high temperature resistance: TaC coatings can withstand temperatures up to 2200°C, making them ideal for applications in high temperature environments such as epitaxial reaction chambers.

● High hardness: The hardness of TaC reaches about 2000 HK, which is much harder than commonly used stainless steel or aluminum alloy, which can effectively prevent surface wear.

● Strong chemical stability: TaC coating performs well in chemically corrosive environments and can greatly extend the service life of epitaxial equipment components.

● Good electrical conductivity: TaC coating has good electrical conductivity, which is conducive to electrostatic release and heat conduction.

These properties make TaC coating an ideal material for manufacturing critical parts such as internal bushings, reaction chamber walls, and heating elements for epitaxial equipment. By coating these components with TaC, the overall performance and service life of the epitaxial equipment can be improved.

For silicon carbide epitaxy, TaC coating chunk can also play an important role. The surface of TaC coating is smooth and dense, which is conducive to the formation of high-quality silicon carbide films. At the same time, the excellent thermal conductivity of TaC can help improve the uniformity of the temperature distribution inside the equipment, thereby improving the temperature control accuracy of the epitaxial process, and ultimately achieving higher quality silicon carbide epitaxial layer growth.

VeTek Semiconductor's TaC Coating Chuck product shops: