TaC Coating Plate

VeTek Semiconductor's TaC Coating Plate is a remarkable product that offers exceptional features and advantages. Designed with precision and engineered to perfection, our TaC Coating Plate is specifically tailored for various applications in silicon carbide (SiC) single crystal growth processes.The TaC Coating Plate's precise dimensions and robust construction make it easy to integrate into existing systems, ensuring seamless compatibility and efficient operation. Its reliable performance and high-quality coating contribute to consistent and uniform results in SiC crystal growth applications.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

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Product Description

As a leading TaC Coating Plate manufacturer and supplier, VeTek Semiconductor TaC Coating Plate works as a key part of Semiconductor Epitaxy reactor, which helps excellent epitaxial layer Yield and growth efficiency and improve product quality. You can rest assured to buy TaC Coating Plate from our factory.

For the production of new semiconductors with harsher and harsher preparation environments, such as the preparation of the third main group nitride epitaxial sheet (GaN) by metal-organic chemical vapor deposition (MOCVD), and the preparation of SiC epitaxial growth films by chemical vapor deposition (CVD) are eroded by gases such as H₂ and NH₃ in high temperature environments. The SiC and BN protective layers on the surface of existing growth carriers or gas channels can fail due to their involvement in chemical reactions, which adversely affects the quality of products such as crystals and semiconductors.

Therefore, it is necessary to find a material with better chemical stability and corrosion resistance as a protective layer to improve the quality of crystals, semiconductors and other products. Tantalum carbide has excellent physical and chemical properties, because of the role of strong chemical bonds, its high temperature chemical stability and corrosion resistance is much higher than SiC, BN, etc., is a great application prospect of corrosion resistance, thermal stability outstanding coating.

VeTek Semiconductor has advanced production equipment and perfect quality management system, strict process control to ensure the TaC coating in batches of performance consistency, the company has large-scale production capacity, to meet the needs of customers in large quantities of supply, perfect quality monitoring mechanism to ensure the quality of each product stable and reliable.

Tantalum carbide coating on a microscopic cross-section:

Tantalum carbide coating on a microscopic cross-section

Basic Product parameter of the TaC Coating Plate:

Physical properties of TaC coating
Coating Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3*10^-6/K
TaC coating Hardness (HK)	2000 HK
Resistance	1×10-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)