TaC Coated Three-petal Ring

VeTek Semiconductor is a leading TaC Coated Three-petal Ring manufacturer and innovator in China.We have been specialized in TaC and SiC coating for many years.Our products have a corrosion resistance, high strength. We look forward to becoming your long-term partner in China.

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Product Description

VeTek Semiconductor is a professional China TaC Coated Three-petal Ring manufacturer and supplier.The TaC Coated Three-petal Ring is used in Aixtron G10-deposition system for compound semiconductor, G10-GaN 150/200 mm high throughput epitaxy for GaN power & RF applications.

VeTek Semiconductor TaC coating is a new generation of high temperature resistant material, with better high temperature stability than SiC, as a corrosion resistant coating, oxidation resistant coating, wear-resistant coating, can be used in the environment above 2000℃, widely used in aerospace ultra-high temperature hot end parts, the third generation of semiconductor single crystal growth and other fields.

Product features:

1. High purity, impurity content < 5ppm

2. High temperature resistance, corrosion resistance, high density, high density

3. It is chemically inert to ammonia, hydrogen, silane and silicon at high temperature and has good thermal stability.

4. Thermal shock resistance, can speed up the operation cycle

5. Strong graphite adhesion ensures long service life and no coating delamination.

6. Strict dimensional tolerances.

Main applications:

1. Epitaxial growth

2. Single crystal growth

3. High temperature corrosion diversion

4. High temperature and oxidation resistant nozzle

5. Gas turbine blades

Product parameter of the TaC Coated Three-petal Ring

Physical properties of TaC coating
Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3×10^-6/K
Hardness (HK)	2000 HK
Resistance	1×10^-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)