TaC Coating Planetary Susceptor

VeTek Semiconductor'TaC Coating Planetary Susceptor is an exceptional product for Aixtron epitaxy equipment. The robust TaC coating provides excellent high-temperature resistance and chemical inertness. This unique combination ensures reliable performance and long service life, even in demanding environments. VeTek is committed to providing high-quality products and serving as a long-term partner in the Chinese market with competitive pricing.

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Product Description

In the realm of semiconductor manufacturing, the TaC Coating Planetary Susceptor plays a crucial role. It is widely used in the growth of silicon carbide (SiC) epitaxial layers in equipment like Aixtron G5 system. Furthermore, when used as an outer disk in tantalum carbide (TaC) coating deposition for SiC epitaxy, the TaC Coating Planetary Susceptor provides essential support and stability. It ensures uniform deposition of the tantalum carbide layer, contributing to the formation of high-quality epitaxial layers with excellent surface morphology and desired film thickness. The TaC coating's chemical inertness prevents unwanted reactions and contamination, maintaining the integrity of the epitaxial layers and ensuring their superior quality.

The TaC coating's exceptional thermal conductivity enables efficient heat transfer, promoting uniform temperature distribution and minimizing thermal stress during the epitaxial growth process. This results in the production of high-quality SiC epitaxial layers with improved crystallographic properties and enhanced electrical conductivity.

The precise dimensions and robust construction of the TaC Coating Planetary Disk make it easy to integrate into existing systems, ensuring seamless compatibility and efficient operation. Its reliable performance and high-quality TaC coating contribute to consistent and uniform results in SiC epitaxy processes.

Trust VeTek Semiconductor and our TaC Coating Planetary Disk for exceptional performance and reliability in SiC epitaxy. Experience the advantages of our innovative solutions, positioning you at the forefront of technological advancements in the semiconductor industry.

TaC coating and SiC coating spare parts we supply:

Product parameter of the TaC Coating Planetary Susceptor:

Physical properties of TaC coating
Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3 10-6/K
Hardness (HK)	2000 HK
Resistance	1×10-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)