TaC Coating Pedestal Support Plate

VeTek Semiconductor is China manufacturer & supplier who mainly produces CVD TaC coating susceptors, Inlet ring, Wafer Chunck, TaC coated holder, TaC Coating Pedestal Support Plate with many years of experience. Hope to build business relationship with you.

TaC ceramics have a melting point of up to 3880℃, high hardness (Mohs hardness 9 ~ 10), large thermal conductivity (22W·m^-1·K⁻¹), large bending strength (340 ~ 400MPa), and small thermal expansion coefficient (6.6×10⁻⁶K⁻¹), and show excellent thermochemical stability and excellent physical properties. It has good chemical and mechanical compatibility with graphite and C/C composite materials, so TaC coating is widely used in aerospace thermal protection, single crystal growth and epitaxial reactors like Aixtron, LPE EPI reactor in semiconductor industry. 

TaC coated graphite has better chemical corrosion resistance than bare stone ink or SiC coated graphite, can be used stably at 2200° high temperature, does not react with many metal elements, is the third generation of semiconductor single crystal growth, epitaxy and wafer etching scene of the best performance coating, can significantly improve the process of temperature and impurity control, Preparation of high quality silicon carbide wafers and related epitaxial wafers. It is especially suitable for growing GaN or AlN single crystal in MOCVD equipment and SiC single crystal in PVT equipment, and the quality of the single crystal grown is obviously improved.