China SiC Epitaxy Process Manufacturer, Supplier, Factory

VeTek Semiconductor's unique carbide coatings provide superior protection for graphite parts in the SiC Epitaxy Process for the processing of demanding semiconductor and composite semiconductor materials. The result is extended graphite component life, preservation of reaction stoichiometry, inhibition of impurity migration to epitaxy and crystal growth applications, resulting in increased yield and quality.

Our tantalum carbide (TaC) coatings protect critical furnace and reactor components at high temperatures (up to 2200°C) from hot ammonia, hydrogen, silicon vapors and molten metals. VeTek Semiconductor has a wide range of graphite processing and measurement capabilities to meet your customized requirements, so we can offer a fee-paying coating or full-service, with our team of expert engineers ready to design the right solution for you and your specific application.

Compound semiconductor crystals

VeTek Semiconductor can provide special TaC coatings for various components and carriers. Through VeTek Semiconductor's industry leading coating process,the TaC coating can obtain high purity, high temperature stablity and high chemical resistance,thereby improving the product quality of crystal TaC/GaN)and EPl layers, and extending the lifetime of critical reactor components.

Thermal insulators

SiC, GaN and AlN crystal growth components including crucibles, seed holders, deflectors and filters. Industrial assemblies including resistive heating elements, nozzles, shielding rings and brazing fixtures, GaN and SiC epitaxial CVD reactor components including wafer carriers, satellite trays, shower heads, caps and pedestals, MOCVD components.

Purpose:

● LED(Light Emitting Diode) Wafer Carrier

● ALD(Semiconductor) Susceptor

● EPI Susceptor(SiC Epitaxy Process)

CVD TaC coating planetary SiC epitaxial susceptor TaC Coated Ring for SiC Epitaxial Reactor TaC Coated Three-petal Ring Tantalum Carbide Coated Halfmoon Part for LPE

Comparision of SiC Coating and TaC Coating:

	SiC	TaC
Main Features	Ultra high purity,Excellent Plasma resistance	Excellent high temperature stability(high temperature process conformance)
Purity	>99.9999%	>99.9999%
Density (g/cm³)	3.21	15
Hardness (kg/mm²)	2900-3300	6.7-7.2
Resistivity [Ωcm]	0.1-15,000	<1
Thermal conductivity (W/m-K)	200-360	22
Coefficient of thermal expansion(10^-6/℃)	4.5-5	6.3
Application	Semiconductor Equipment Ceramic jig(Focus Ring, Shower Head, Dummy Wafer)	SiC Single crystal growth, Epi, UV LED Equipment parts

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TaC Coating Spare Part

VeTek Semiconductor is a professional manufacturer of TaC Coating Plate and other TaC Coating spare parts in China. TaC Coating is currently mainly used in processes such as silicon carbide single crystal growth (PVT method), epitaxial disk (including silicon carbide epitaxy, LED epitaxy), etc. Combined with the good long-term stability of TaC Coating Plate, VeTek Semiconductor TaC Coating Plate has become the benchmark for TaC Coating spare parts. We look forward to you becoming our long-term partner.

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GaN on SiC epi susceptor

VeTek Semiconductor is a professional manufacturer of GaN on SiC epi susceptor, CVD SiC coating, and CVD TAC COATING graphite susceptor in China. Among them, GaN on SiC epi susceptor plays a vital role in semiconductor processing. Through its excellent thermal conductivity, high temperature processing ability and chemical stability, it ensures the high efficiency and material quality of the GaN epitaxial growth process. We sincerely look forward to your further consultation.

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CVD TaC Coating Carrier

VeTek Semiconductor's CVD TaC Coating carrier is mainly designed for the epitaxial process of semiconductor manufacturing. CVD TaC Coating carrier’s Ultra-high melting point, excellent corrosion resistance, and outstanding thermal stability determine the indispensability of this product in semiconductor epitaxial process.we sincerely hope to build a long-term business relationship with you.

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TaC Coated Graphite Susceptor

VeTek Semiconductor’s TaC Coated Graphite Susceptor uses chemical vapor deposition(CVD) method to prepare tantalum carbide coating on the surface of graphite parts. This process is the most mature and has the best coating properties. TaC Coated Graphite Susceptor can extend the service life of graphite components, inhibit the migration of graphite impurities, and ensure the quality of epitaxy. VeTek Semiconductor is looking forward to your inquiry.

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TaC Coating Susceptor

VeTek Semiconductor presents the TaC Coating Susceptor, With its exceptional TaC coating, this susceptor offers a multitude of advantages that set it apart from conventional solutions.Integrating seamlessly into existing systems, the TaC Coating Susceptor from VeTek Semiconductor guarantees compatibility and efficient operation. Its reliable performance and high-quality TaC coating consistently deliver exceptional results in SiC epitaxy processes.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

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TaC Coating Rotation Plate

VeTek Semiconductor's TaC Coating Rotation Plate boasts an outstanding TaC coating,With its exceptional TaC coating, TaC Coating Rotation Plate boasts have remarkable high-temperature resistance and chemical inertness,that set it apart from traditional solutions.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

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As a professional SiC Epitaxy Process manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable SiC Epitaxy Process made in China, you can leave us a message.