TaC Coating Spare Part

VeTek Semiconductor is a professional manufacturer of TaC Coating Plate and other TaC Coating spare parts in China. TaC Coating is currently mainly used in processes such as silicon carbide single crystal growth (PVT method), epitaxial disk (including silicon carbide epitaxy, LED epitaxy), etc. Combined with the good long-term stability of TaC Coating Plate, VeTek Semiconductor TaC Coating Plate has become the benchmark for TaC Coating spare parts. We look forward to you becoming our long-term partner.

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Product Description

VeTek Semiconductor TaC Coating Plate is a special material widely used in the semiconductor manufacturing process. Combined with its high hardness and wear resistance, high temperature resistance, corrosion resistance, low friction coefficient and good thermal conductivity, TaC Coating Plate plays an irreplaceable role in many links of semiconductor processing.

Generally, the applications of TaC coated plates in semiconductor processing are as follows:

CVD/ALD growth substrate: The high temperature resistance, chemical stability and low friction coefficient of TaC coated plates make them ideal CVD/ALD growth substrates. It can provide a stable growth environment to ensure the uniformity and density of the film.

Etching mask plate: The high hardness and corrosion resistance of TaC coated plates enable them to withstand high-energy processes such as plasma etching, as etching mask plates, protecting the underlying film.

CMP polishing pad: The wear resistance and low friction coefficient of TaC coated plates make them ideal materials for CMP polishing pads, which can effectively remove particles and defects on the surface of the film.

High temperature furnace tube: The high temperature resistance and corrosion resistance of TaC coated plates enable them to be used as furnace tubes in high temperature furnaces for high temperature annealing, diffusion and other processes.

Combined with the product characteristics of TaC Coating Plate, it determines that this product plays an irreplaceable key role in improving device performance, extending equipment life and improving production efficiency.

As a professional manufacturer of GaN on SiC epi susceptor, Porous Graphite and TaC Coating Plate in China, VeTek Semiconductor always insists on providing customized product services, and is committed to providing the industry with top technology and product solutions. We sincerely look forward to your further consultation.

CVD TAC COATING Technical Parameters：