SiC Coated Support Ring

VeTek Semiconductor, a leading manufacturer and supplier based in China, specializes in producing a range of products including SiC coated support rings, CVD silicon carbide coatings, tantalum carbide coatings, bulk SiC, SiC powders, and high-purity SiC materials. Our dedication lies in offering comprehensive technical assistance and optimal product resolutions tailored for the semiconductor sector. Feel free to reach out to us for further information and assistance.

VeTek Semiconductor’s SiC coated support rings are a new generation of high temperature resistant materials. As corrosion resistant coatings, oxidation resistant coatings, and wear resistant coatings, they can be used in environments above 1650℃, and are widely used in  semiconductor fields.

The high-quality characteristics of SiC coated support rings play a very important role in the epitaxial growth of third-generation semiconductor components.

Maintaining temperature uniformity: SiC coated support rings have excellent thermal conductivity and can provide uniform temperature distribution during epitaxial growth. This helps to reduce thermal gradients and stresses on the wafer surface, thereby improving the quality of the epitaxial layer.

Extreme Chemical Stability: During the epitaxial growth process, SiC coated support rings are able to resist chemical attack from the reaction gases, extending the life of the support rings and maintaining the integrity of the process. This chemical stability helps reduce the risk of contamination and improve the purity and performance of semiconductor devices.

Precise Positioning: SiC coated support rings are able to maintain the precise positioning of the wafer, which is critical to achieving uniform layer deposition. This precise positioning helps ensure the consistency of the thickness and quality of the epitaxial layer.

Basic physical properties of CVD SiC coating:

VeTek Semiconductor Production Shop:

Overview of the semiconductor chip epitaxy industry chain: