SiC Coating Cover Segments

Vetek Semiconductor is dedicated to the advancement and commercialization of CVD SiC coating and CVD TaC coating. As an illustration, our SiC Coating Cover Segments undergoes meticulous processing, resulting in a dense CVD SiC coating with exceptional precision. It exhibits remarkable resistance to high temperatures and offers robust protection against corrosion. We welcome your inquiries.

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Product Description

You can rest assured to buy SiC Coating Cover Segments from our factory.

Micro LEDs technology is disrupting the existing LED ecosystem with methods and approaches that have until now only been seen in the LCD or semiconductor industries. The Aixtron G5 MOCVD system perfectly supports these stringent extensional requirements. It is a powerful MOCVD reactor designed primarily for silicon-based GaN epitaxy growth.

Aixtron G5 is a horizontal Planetary disk epitaxy system, mainly consisting of components such as the CVD SiC coating Planetary disc, MOCVD susceptor, SiC Coating Cover Segments, SiC coating cover ring, SiC coating ceiling, SiC coating supporting ring, SiC coating cover disc, SiC coating exhaust collector, pin washer, collector inlet ring, etc.

As a CVD SiC coating manufacturer, VeTek Semiconductor offers Aixtron G5 SiC Coating Cover Segments. These susceptors are made of high purity graphite and feature a CVD SiC coating with impurity below 5ppm.

CVD SiC Coating Cover Segments products exhibit excellent corrosion resistance, superior thermal conductivity, and high-temperature stability. These products effectively resist chemical corrosion and oxidation, ensuring durability and stability in harsh environments. The outstanding thermal conductivity enables efficient heat transfer, enhancing thermal management efficiency. With their high-temperature stability and resistance to thermal shock, CVD SiC coatings can withstand extreme conditions. They prevent graphite substrate dissolution and oxidation, reducing contamination and improving production efficiency and product quality. The flat and uniform coating surface provides a solid foundation for film growth, minimizing defects caused by lattice mismatch and enhancing film crystallinity and quality. In summary, CVD SiC coated graphite products offer reliable material solutions for various industrial applications, combining exceptional corrosion resistance, thermal conductivity, and high-temperature stability.

Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg-1·K-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m-1·K-1
Thermal Expansion(CTE)	4.5×10-6K-1