Graphite Rotating Susceptor

High-purity graphite rotating susceptors are used in material processing equipment under high temperature and high vacuum environments. In the epitaxial growth of gallium nitride (MOCVD process), they play a supporting role in the rotation of the substrate. VeTekSemi's Rotating Graphite susceptor has the following advantages:

●  High purity: The impurity content in high-purity graphite rotating susceptors is below 5 ppm. This level of purity graphite can avoid the release of impurities at high temperatures to ensure the cleanliness of the deposition process. Therefore, no coating is required to meet the working requirements.

High purity graphite

●  Excellent thermal properties: High-purity graphite has excellent thermal conductivity, and its thermal conductivity is much higher than other materials. The thermal expansion coefficient is small and can maintain stable performance when experiencing temperature changes.

●  Good mechanical properties: High-purity graphite has good wear resistance and toughness, which can meet the complex requirements of CVD process.

●  Excellent conductivity: The conductivity is one hundred times higher than that of general non-metallic minerals.

●  Chemical stability: It can resist corrosion from acids, alkalis and organic solvents

Moreover, as a leading manufacturer and supplier of High purity graphite rotating susceptor in China, VeTek Semiconductor also supplies high-quality SiC Coated Graphite Susceptor for MOCVD, SiC Coated Barrel Susceptor, TaC Coated Graphite Susceptor and MOCVD SiC coating susceptor. VeTek Semiconductor is committed to providing advanced technology and product solutions for the semiconductor industry, and also supports customized services. We sincerely look forward to becoming your long-term partner in China.

VeTek Semiconductor Graphite Rotating Susceptor product shops: