SiC Coated Graphite Barrel Susceptor for EPI

VeTek Semiconductor is a professional manufacturer, supplier and exporter for the SiC coated graphite barrel susceptor for EPI. Supported by a professional team and leading technology, VeTek Semiconductor can provide you high quality at reasonable prices. we welcome you to visit our factory for further discussion.

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Product Description

VeTek Semiconductor is China manufacturer & supplier who mainly produces SiC coated graphite barrel susceptor for EPI with many years of experience. Hope to build business relationship with you. EPI (Epitaxy) is a critical process in the manufacturing of advanced semiconductors. It involves the deposition of thin layers of material on a substrate to create complex device structures. SiC coated graphite barrel susceptor for EPI are commonly used as susceptors in EPI reactors due to their excellent thermal conductivity and resistance to high temperatures. With CVD-SiC coating, it becomes more resistant to contamination, erosion, and thermal shock. This results in a longer lifespan for the susceptor and improved film quality.

Advantages of our SiC Coated Graphite Barrel Susceptor:

Reduced Contamination: SiC's inert nature prevents impurities from adhering to the susceptor surface, reducing the risk of contamination of the deposited films.

Increased Erosion Resistance: SiC is significantly more resistant to erosion than conventional graphite, leading to a longer lifespan for the susceptor.

Improved Thermal Stability: SiC has excellent thermal conductivity and can withstand high temperatures without significant distortion.

Enhanced Film Quality: The improved thermal stability and reduced contamination result in higher-quality deposited films with improved uniformity and thickness control.

Applications:

SiC coated graphite barrel susceptors are widely used in various EPI applications, including:

GaN-based LEDs

Power electronics

Optoelectronic devices

High-frequency transistors

Sensors

Product parameter of the SiC Coated Graphite Barrel Susceptor

Physical properties of isostatic graphite
Property	Unit	Typical Value
Bulk Density	g/cm³	1.83
Hardness	HSD	58
Electrical Resistivity	μΩ.m	10
Flexural Strength	MPa	47
Compressive Strength	MPa	103
Tensile Strength	MPa	31
Young' s Modulus	GPa	11.8
Thermal Expansion(CTE)	10-6K-1	4.6
Thermal Conductivity	W·m-1·K-1	130
Average Grain Size	μm	8-10
Porosity	%	10
Ash Content	ppm	≤10 (after purified)

Note: Before coating, we will do first purification, after coating, will do second purification.

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg-1·K-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m-1·K-1
Thermal Expansion(CTE)	4.5×10-6K-1