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Silicon Carbide Wafer Boat for Horizontal Furnace
VeTek Semiconductor is a professional manufacturer and supplier in China for silicon carbide wafer boat for horizontal furnace, with years of experience in R&D and production, can control the quality well and offer a competitive price. You can rest assured to buy the silicon carbide wafer boat for horizontal furnace from us.
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Product Description
High quality Silicon carbide wafer boat for horizontal furnace is offered by China manufacturer VeTek Semiconductor. Buy Silicon carbide wafer boat for horizontal furnace which is of high quality directly from factory with low price.Silicon carbide wafer boat for horizontal furnace is used in furnace tubes for loading and transferring wafers during high-temperature treatments. Due to the excellent properties of silicon carbide materials such as high temperature resistance, chemical corrosion resistance, and thermal stability, they are widely used in various heat treatment processes such as diffusion, oxidation, CVD, and annealing.
Silicon carbide wafer boat for horizontal furnace is made of silicon carbide material and has the following characteristics:
1. High hardness and wear resistance: Silicon carbide has a hardness second only to diamond, making it highly wear-resistant. This allows silicon carbide boats to withstand repeated mechanical impacts and friction, extending their service life.
2. High temperature resistance: Silicon carbide has a melting point of 2730°C, making silicon carbide boats suitable for high-temperature environments and various semiconductor manufacturing processes, such as high-temperature oxidation and diffusion.
3. Low thermal expansion coefficient: Silicon carbide has a low thermal expansion coefficient, which helps maintain dimensional stability at high temperatures, preventing deformation of the boat and affecting wafer processing accuracy.
4. Good chemical stability: Silicon carbide is resistant to most chemicals and does not react with common acid and alkaline solutions, ensuring the safety and cleanliness of the wafers.
We can manufacture different types of silicon carbide wafer boat such as horizontal wafer boat, vertical wafer boat, and any other customized boats.
We use high purity recrystallized silicon carbide with below parameters:
| Physical properties of Recrystallized Silicon Carbide | |
| Property | Typical Value |
| Working temperature (°C) | 1600°C (with oxygen), 1700°C (reducing environment) |
| SiC content | > 99.96% |
| Free Si content | < 0.1% |
| Bulk density | 2.60-2.70 g/cm3 |
| Apparent porosity | < 16% |
| Compression strength | > 600 MPa |
| Cold bending strength | 80-90 MPa (20°C) |
| Hot bending strength | 90-100 MPa (1400°C) |
| Thermal expansion @1500°C | 4.70 10-6/°C |
| Thermal conductivity @1200°C | 23 W/m•K |
| Elastic modulus | 240 GPa |
| Thermal shock resistance | Extremely good |
Applications
Silicon carbide wafer boat for horizontal furnaces find wide applications in semiconductor and photovoltaic industries:
Wafer cleaning and etching
Diffusion and oxidation
Electroplating and etching
Chemical Mechanical Polishing (CMP)
Heat treatment
Wafer transfer and storage
VeTek Semiconductor Production Shop
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