Silicon Carbide Ceramic Wafer Boat

VeTek Semiconductor specializes in providing high-quality wafer boats, pedestals and custom wafer carriers in vertical/column and horizontal configurations to meet various semiconductor process requirements. As a leading manufacturer and supplier of silicon carbide coating films, our semiconductor wafer boats are favored by the European and American markets for their high cost-effectiveness and excellent quality, and are widely used in advanced semiconductor manufacturing processes. VeTek Semiconductor is committed to establishing long-term and stable cooperative relationships with global customers, and especially hopes to become your reliable semiconductor process partner in China.

Send Inquiry

Product Description

The Advantages of Using Veteksemi Silicon Carbide Ceramic Wafer Boat

● Very high Temperature Resistance to 3000 F ( 1650℃ ）

● Super corrosion resistance to acids, solvents, salts, and organics, wear resistant

● Easy to clean

● Strong impact resistance

● Slip Free

VeTek Semiconductor manufacturing industry typically processes these wafers in either horizontal Wafer carrier or vertical carriers.

● The horizontal carrier, typically called a "boat", has three or four horizontally disposed bars arranged in a semicircle design, with each bar having inwardly facing grooves set therein at regular intervals. Each set of grooves define a vertical space for carrying a vertically disposed wafer.

● The vertical carrier, typically called a "vertical rack", has three or four vertically disposed rods (or posts) arranged in a semicircle design, with each post having slots set therein at regular intervals to define a space for supporting a horizontally disposed wafer.

To insure the geometrical precision required in this field, the three or four rods are fixed to a top plate and a bottom plate. The portions of the post between each slot, termed "teeth", are identically spaced in order to support wafers at regular intervals from and parallel to the bottom plate. The entire rack is then placed within a vertical furnace for processing the wafers.

Because a wafer processed on a vertical rack experiences less of a temperature gradient over its face (as compared to a wafer processed in a horizontal boat), semiconductor manufacturers are increasingly turning to vertical furnaces. There is, however, a drawback to vertical furnacing. The wafers disposed on a conventional vertical rack are supported at their outside edge only. As such, the areas of the wafer resting on these teeth experience higher stress than the rest of the wafer.

When temperatures in the furnace exceed about 1000°C, these stresses often become significant and portions of the single crystal wafer move relative to each other along crystallographic plates in response to that stress. This phenomenon, called "slip", effectively destroys the value of the semiconductor devices located in the area of the wafer where slip has occurred.

As a leading Silicon Carbide Ceramic Wafer Boat supplier and manufacturer in China, VeTek Semiconductor has always been committed to providing advanced technology and Wafer Boat product solutions for the semiconductor processing industry. We sincerely look forward to becoming your long-term partner in China.