SiC Wafer Boat

VeTek Semiconductor's SiC Wafer Boat is a very high performance product. Our SiC Wafer Boat is usually used in semiconductor oxidation diffusion furnaces to ensure that the temperature is evenly distributed on the wafer and improve the silicon wafer processing quality. The high temperature stability and high thermal conductivity of SiC materials ensure efficient and reliable semiconductor processing. We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.

Send Inquiry

Product Description

The following is the introduction of high quality SiC Wafer Boat from VeTek Semiconductor, hoping to help you better understand SiC Wafer Boat. Welcome new and old customers to continue to cooperate with us to create a better future!

Overview of SiC Wafer Boat Application:

SiC horizontal square wafer boats serve as critical components in high-temperature diffusion processes, functioning as wafer supports. These boats play a vital role in safely and efficiently handling delicate wafers during processing.

SiC Wafer Boat Feature Requirements:

High Temperature Strength: The boat must demonstrate exceptional strength at high temperatures to endure the harsh environments of high-temperature processing.

High Temperature Chemical Stability: Maintaining structural integrity and chemical composition under extreme high-temperature conditions ensures process purity.

Particle-Free Performance: The boat must be free of particle generation or contamination to safeguard the quality of the processed wafers.

Why choose Vetek Semiconductor's SiC Wafer Boat?

Versatile Specifications: Vetek Semiconductor offers a range of standard specifications and provides customized services to meet specific requirements.

Quality and Speed: Vetek Semiconductor ensures high-quality products and swift delivery, catering to the demands of fast-paced industries.

Material Expertise: Leveraging dense recrystallized silicon carbide material guarantees superior performance and longevity of the boats.

High Temperature Threshold: Vetek Semiconductor boats boast a maximum operating temperature of 1600°C, suitable for the most demanding high-temperature processes.

Cost-Effectiveness: Vetek Semiconductor boats offer a highly competitive cost-performance ratio, delivering value for money.

Durability: With a long lifespan, Vetek Semiconductor boats provide reliability and consistency in wafer handling processes.

Vetek Semiconductor stands out in the market for its commitment to quality, customization options, material innovation, high-temperature capabilities, cost-effectiveness, and longevity, making it the preferred choice for semiconductor manufacturers globally.

Product parameter of the SiC Wafer Boat:

Physical properties of Recrystallized Silicon Carbide
Property	Typical Value
Working temperature (°C)	1600°C (with oxygen), 1700°C (reducing environment)
SiC content	> 99.96%
Free Si content	< 0.1%
Bulk density	2.60-2.70 g/cm3
Apparent porosity	< 16%
Compression strength	> 600 MPa
Cold bending strength	80-90 MPa (20°C)
Hot bending strength	90-100 MPa (1400°C)
Thermal expansion @1500°C	4.70 10-6/°C
Thermal conductivity @1200°C	23 W/m•K
Elastic modulus	240 GPa
Thermal shock resistance	Extremely good