SiC Coating Set Disc
  • SiC Coating Set DiscSiC Coating Set Disc
  • SiC Coating Set DiscSiC Coating Set Disc

SiC Coating Set Disc

VeTek Semiconductor, a leading manufacturer of CVD SiC coatings, offers SiC Coating Set Disc in Aixtron MOCVD Reactors. These SiC Coating Set Disc are crafted using high purity graphite and feature a CVD SiC coating with impurity below 5ppm. We welcome inquiries about this product.

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Product Description

VeTek Semiconductor is SiC coating China manufacturer & supplier who mainly produces SiC Coating Set Disc, collector, susceptor with many years of experience. Hope to build business relationship with you.

The Aixtron SiC Coating Set Disc is a high-performance product designed for a wide range of applications. The kit is made of high quality graphite material with a protective silicon carbide (SiC) coating.

The silicon carbide (SiC) coating on the surface of the disc has several important advantages. First of all, it greatly improves the thermal conductivity of the graphite material, achieving efficient heat conduction and precise temperature control. This ensures uniform heating or cooling of the entire disc set during use, resulting in consistent performance.

Second, the silicon carbide (SiC) coating has excellent chemical inertness, making the disc set highly resistant to corrosion. This corrosion resistance ensures the longevity and reliability of the disc, even in harsh and corrosive environments, making it suitable for a variety of application scenarios.

In addition, the silicon carbide (SiC) coating improves the overall durability and wear resistance of the disc set. This protective layer helps the disc withstand repeated use, reducing the risk of damage or degradation that may occur over time. The enhanced durability ensures the long-term performance and reliability of the disc set.

Aixtron SiC Coating Set Discs are widely used in semiconductor manufacturing, chemical processing and research laboratories. Its excellent thermal conductivity, chemical resistance and durability make it ideal for critical applications requiring precise temperature control and corrosion resistant environments.


Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property Typical Value
Crystal Structure FCC β phase polycrystalline, mainly (111) oriented
Density 3.21 g/cm³
Hardness 2500 Vickers hardness(500g load)
Grain SiZe 2~10μm
Chemical Purity 99.99995%
Heat Capacity 640 J·kg-1·K-1
Sublimation Temperature 2700℃
Flexural Strength 415 MPa RT 4-point
Young' s Modulus 430 Gpa 4pt bend, 1300℃
Thermal Conductivity 300W·m-1·K-1
Thermal Expansion(CTE) 4.5×10-6K-1


Industrial Chain:


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