SiC Coating Collector Top

Welcome to VeTek Semiconductor, your trusted manufacturer of CVD SiC coatings. We take pride in offering Aixtron SiC Coating Collector Top, which are expertly engineered using high purity graphite and feature a state-of-the-art CVD SiC coating with impurity below 5ppm. Please don't hesitate to reach out to us with any questions or inquiries

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Product Description

With years of experience in production TaC coating and SiC coating, VeTek Semiconductor can supply a wide range of SiC Coating Collector Top, collector center, collector bottom for Aixtron system. High quality SiC Coating Collector Top can meet many applications, if you need, please get our online timely service about SiC Coating Collector Top. In addition to the product list below, you can also customize your own unique SiC Coating Collector Top according to your specific needs.

SiC coating collector top, SiC coating collector center, and SiC coating collector bottom are the three basic components used in the semiconductor manufacturing process. Let's discuss each product separately:

VeTek Semiconductor SiC Coating Collector Top plays a crucial role in the semiconductor deposition process. It acts as a support structure for the deposited material, helping to maintain uniformity and stability during deposition. It also AIDS in thermal management, effectively dissipating the heat generated during the process. The top of the collector ensures the correct arrangement and distribution of the deposited material, resulting in high-quality and consistent film growth.

The SiC coating on collector Top, collector center, collector bottom significantly improves their performance and durability. SiC(silicon carbide) coating is known for its excellent thermal conductivity, chemical inertness and corrosion resistance. The SiC coating at the top, center and bottom of the collector provides excellent thermal management capabilities, ensuring efficient heat dissipation and maintaining optimal process temperatures. It also has excellent chemical resistance, protecting components from corrosive environments and extending their service life. The properties of SiC coatings help to improve the stability of semiconductor manufacturing processes, reduce defects and improve film quality.

Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg-1·K-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m-1·K-1
Thermal Expansion(CTE)	4.5×10-6K-1