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China Tantalum Carbide Coating Manufacturer, Supplier, Factory
VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.
The main products are Tantalum Carbide coating defector ring, TaC coated diversion ring, TaC coated halfmoon parts, Tantalum Carbide Coated Planetary Rotation Disk (Aixtron G10) , TaC Coated Crucible; TaC Coated Rings; TaC Coated Porous Graphite; Tantalum Carbide Coating Graphite Susceptor; TaC Coated Guide Ring; TaC Tantalum Carbide Coated Plate; TaC Coated Wafer Susceptor; TaC Coating Ring; TaC Coating Graphite Cover; TaC Coated Chunk etc., the purity is below 5ppm, can meet customer requirements.
TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:
The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.
Key Features:
● Temperature stability
● Ultra high purity
● Resistance to H2, NH3, SiH4,Si
● Resistance to thermal stock
● Strong adhesion to graphite
● Conformal coating coverage
● Size up to 750 mm diameter(The only manufacturer in China reaches this size)
Applications:
● Inductive heating susceptor
● Resistive heating element
● Heat shield
Tantalum carbide (TaC) coating on a microscopic cross-section:
Parameter of VeTek Semiconductor Tantalum Carbide Coating:
| Physical properties of TaC coating | |
| Density | 14.3 (g/cm³) |
| Specific emissivity | 0.3 |
| Thermal expansion coefficient | 6.3 10-6/K |
| Hardness (HK) | 2000 HK |
| Resistance | 1×10-5 Ohm*cm |
| Thermal stability | <2500℃ |
| Graphite size changes | -10~-20um |
| Coating thickness | ≥20um typical value (35um±10um) |
TaC coating EDX data：
TaC coating crystal structure data:
| Element | Atomic percent | |||
| Pt. 1 | Pt. 2 | Pt. 3 | Average | |
| C K | 52.10 | 57.41 | 52.37 | 53.96 |
| Ta M | 47.90 | 42.59 | 47.63 | 46.04 |
- View as
TaC Coating Rotation Plate
VeTek Semiconductor's TaC Coating Rotation Plate boasts an outstanding TaC coating,With its exceptional TaC coating, TaC Coating Rotation Plate boasts have remarkable high-temperature resistance and chemical inertness,that set it apart from traditional solutions.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.
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TaC Coating Plate
VeTek Semiconductor's TaC Coating Plate is a remarkable product that offers exceptional features and advantages. Designed with precision and engineered to perfection, our TaC Coating Plate is specifically tailored for various applications in silicon carbide (SiC) single crystal growth processes.The TaC Coating Plate's precise dimensions and robust construction make it easy to integrate into existing systems, ensuring seamless compatibility and efficient operation. Its reliable performance and high-quality coating contribute to consistent and uniform results in SiC crystal growth applications.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.
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CVD TaC Coating Cover
CVD TaC coating cover provided by VeTek Semiconductor is a highly specialized component designed specifically for demanding applications. With its advanced features and exceptional performance, our CVD TaC coating cover offers several key advantages.Our CVD TaC coating cover provides the necessary protection and performance required for success.We looking forward to exploring potential cooperation with you!
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TaC Coating Planetary Susceptor
VeTek Semiconductor'TaC Coating Planetary Susceptor is an exceptional product for Aixtron epitaxy equipment. The robust TaC coating provides excellent high-temperature resistance and chemical inertness. This unique combination ensures reliable performance and long service life, even in demanding environments. VeTek is committed to providing high-quality products and serving as a long-term partner in the Chinese market with competitive pricing.
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TaC Coating Pedestal Support Plate
VeTek Semiconductor's TaC Coating Pedestal Support Plate is a high-precision product designed to meet the specific requirements of semiconductor epitaxy processes. With its TaC coating, high-temperature resistance, and chemical inertness, our product empowers you to produce high-quality EPI layers with high quality. We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.
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TaC Coating Chuck
VeTek Semiconductor's TaC Coating Chuck features a high-quality TaC coating,known for its outstanding high-temperature resistance and chemical inertness, particularly in silicon carbide (SiC) epitaxy(EPI) processes. With its exceptional features and superior performance, our TaC Coating Chuck offers several key advantages.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.
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As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
