Tantalum Carbide Coating Ring

VeTek semiconductor Tantalum Carbide Coating Ring is a indispensable component in the semiconductor industry, specifically in the etching of SiC wafers. Its combination of a graphite base and TaC coating ensures superior performance in high-temperature and chemically aggressive environments. With its enhanced thermal stability, corrosion resistance, and mechanical strength, the Tantalum Carbide Coated Ring helps semiconductor manufacturers achieve precision, reliability, and high-quality results in their production processes.

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Product Description

SiC Etching Process Application of Tantalum Carbide Coating Ring

The Tantalum Carbide Coating Ring is primarily used in the SiC etching process, an essential step in the production of semiconductor devices such as power devices and RF devices. SiC (Silicon Carbide) is a material widely used in high-performance semiconductor applications due to its ability to withstand high voltages, temperatures, and frequencies. The etching of SiC wafers is a delicate process that requires components capable of withstanding harsh conditions while maintaining precision and stability.

High-temperature and High-precision Environments

VeTek semiconductor's TaC Coating Ring is particularly useful in high-temperature semiconductor environments where it is exposed to elevated temperatures and reactive gases. Its TaC coating protects it from the corrosive effects of these substances, maintaining its functionality throughout the etching process.

SiC Wafer Handling

The TaC Coated Ring serves as an excellent holder and support system for SiC wafers during the etching process. Its precise fit ensures that the wafer is positioned correctly, preventing any movement during etching that could result in uneven or imperfect surfaces.

Etching in Advanced Semiconductor Manufacturing

The Tantalum Carbide Coating Ring plays a crucial role in maintaining the precision and quality required in the semiconductor industry, particularly in the manufacturing of advanced devices where both the integrity of the wafer and the quality of the etching process are paramount.

The longevity of the TaC Coated Ring is one of its most significant advantages. The TaC coating provides an additional layer of protection that extends the life of the component, even in the harshest semiconductor etching environments. This reduced wear and tear not only translates to fewer replacements but also reduces the overall operating costs for semiconductor manufacturers. By extending the component’s lifespan, the TaC Coating Ring offers a cost-effective solution for high-volume production lines that require reliable and durable parts.

As a leading supplier and manufacturer of Tantalum Carbide Coating Ring in China, VeTek semiconductor TaC Coated Ring is a highly specialized and indispensable component in the semiconductor industry, specifically in the etching of SiC wafers. Designed for durability and longevity, it provides an excellent solution for improving efficiency and reducing operational costs in SiC etching applications. VeTek Semiconductor sincerely hopes to become your long-term partner in China.

Physical properties of TaC coating

Physical properties of TaC coating
TaC coating Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3*10^-6/K
TaC coating Hardness (HK)	2000 HK
Resistance	1×10^-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)