Tantalum Carbide coated guide ring

The main preparation method of SiC single crystal is PVT method. Under low pressure and high temperature conditions, silicon carbide powder with larger particle size (>200μm) decomposes and sublimates into various gas phase substances, which are transported to the seed crystal with lower temperature under the drive of temperature gradient and react and deposit, and recrystallize into silicon carbide single crystal. In this process, TaC coating guide ring plays an important role to ensure that the gas flow between the source area and the growth area is stable and uniform, thereby improving the quality of crystal growth and reducing the impact of uneven air flow.

The role of TaC coating guide ring in PVT method SiC single crystal growth

●  Airflow guidance and distribution

The main function of TaC coating guide ring is to control the flow of source gas and ensure that the gas flow is evenly distributed throughout the growth area. By optimizing the path of airflow, it can help the gas to be deposited more evenly in the growth area, thereby ensuring more uniform growth of SiC single crystal and reducing defects caused by uneven airflow.

●  Temperature gradient control

In the growth process of SiC single crystal, temperature gradient is very critical. TaC coating guide ring can help regulate the gas flow in the source area and growth area, indirectly affecting the temperature distribution. Stable airflow helps the uniformity of the temperature field, thereby improving the quality of the crystal.

●  Improve gas transmission efficiency

Since SiC single crystal growth requires precise control of the evaporation and deposition of the source material, the design of the TaC coating guide ring can optimize the gas transmission efficiency, allowing the source material gas to flow more efficiently to the growth area, improving the growth rate and quality of the single crystal.

VeTek Semiconductor's TaC coating guide ring is composed of high-quality graphite and TaC coating. It has a long service life with strong corrosion resistance, strong oxidation resistance, and strong mechanical strength. VeTek Semiconductor's technical team can help you achieve the most effective technical solution. No matter what your needs are, VeTek Semiconductor can provide corresponding customized products and look forward to your inquiry.

Physical properties of TaC coating

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