SiC Coating Cover Segments Inner

At VeTek Semiconductor, we specialize in the research, development, and industrialization of CVD SiC coating and CVD TaC coating. One exemplary product is the SiC Coating Cover Segments Inner, which undergoes extensive processing to achieve a highly precise and densely coated CVD SiC surface. This coating demonstrates exceptional resistance to high temperatures and provides robust corrosion protection. Feel free to contact us for any inquiries.

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Product Description

High quality SiC Coating Cover Segments Inner is offered by China manufacturer VeTek Semicondutor. Buy SiC Coating Cover Segments(Inner) which is of high quality directly with low price. VeTek Semiconductor SiC Coating Cover Segments(Inner) products are essential components used in advanced semiconductor manufacturing processes for Aixtron MOCVD system.

VeTek Semiconductor's 14x4-inch Complete SiC Coating Cover Segments(Inner) offers the following benefits and application scenarios when used in Aixtron equipment, Here is an integrated description highlighting the product's application and advantages:

● Perfect Fit: These cover segments are precisely designed and manufactured to seamlessly fit Aixtron equipment, ensuring stable and reliable performance.

● High Purity Material: The cover segments are made from high-purity materials to meet the stringent purity requirements of semiconductor manufacturing processes.

● High-Temperature Resistance: The cover segments exhibit excellent resistance to high temperatures, maintaining stability without deformation or damage under high-temperature process conditions.

● Outstanding Chemical Inertness: With exceptional chemical inertness, these cover segments resist chemical corrosion and oxidation, providing a reliable protective layer and extending their performance and lifespan.

● Flat Surface and Precise Machining: The cover segments feature a smooth and uniform surface, achieved through precise machining. This ensures excellent compatibility with other components in Aixtron equipment and provides optimal process performance.

By incorporating our 14x4-inch Complete Inner Cover Segments in Aixtron equipment, high-quality semiconductor thin-film growth processes can be achieved. These cover segments play a crucial role in providing a stable and reliable foundation for thin-film growth.

We are committed to delivering high-quality products that seamlessly integrate with Aixtron equipment. Whether it's process optimization or new product development, we are here to provide technical support and address any inquiries you may have.

Basic physical properties of CVD SiC coating

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
CVD SiC coating Density	3.21 g/cm³
SiC coatingHardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10^-6K^-1