Wafer Handling End Effector

Wafer Handling End Effector is a type of robot hand designed specifically for the semiconductor industry, usually used to handle and transfer wafers. The production environment of wafers requires extremely high cleanliness, because tiny particles or contaminants can cause chips to fail during processing. Ceramic materials are widely used in the manufacture of these hands due to their excellent physical and chemical properties.

Compared with traditional metal materials, the advantages of ceramics in materials are mainly reflected in the following aspects:

    • Corrosion resistance: Wafers are exposed to a variety of chemicals during the manufacturing process, and ceramic materials can effectively resist corrosion and ensure the long-term use of equipment.

    • Low particle release: Since ceramics have extremely low particle release, they will hardly produce particles during the handling process, thereby reducing the risk of contamination to the wafer.

    • Good high temperature resistance: In some processes, wafers need to be handled in a high temperature environment, and the high temperature resistance of ceramic materials’ wafer handling robot enables them to adapt to these harsh environments.

    • Electrical insulation: Ceramics are natural electrical insulators, which is essential for processing processes involving current and can prevent static electricity from affecting wafers.

Conventional wafer handling equipment is made of aluminum, VetekSemi Wafer Handling SiC Boat made of SiC have many advantages. SiC is known for its excellent mechanical strength, superb thermal stability and corrosion resistance. These properties make it an ideal material for Wafer Handling Robotic Arm where cleanliness, precision and reliability are critical.

With the continuous development of semiconductor technology, the size of wafers has gradually increased, which has put forward higher requirements for the design and manufacture of Wafer Handling End Effector. In the future, with the improvement of automation technology, the precision, speed and reliability of End Effector for Wafer Handling will continue to improve.

As one of the core equipment in semiconductor manufacturing, wafer handling robots occupy an important position in semiconductor factories due to their high cleanliness, corrosion resistance and high temperature stability. VeTek Semiconductor can provide customers with customized Wafer Handling End Effector products and pre-sales and after-sales services, and look forward to your consultation.

VeTekSemi Wafer Handling End Effector: