Alumina Ceramic Vacuum Chuck

Alumina Ceramic Vacuum Chuck is a wafer holder for epitaxial processes in semiconductor processing. It is a key tool for stabilizing wafers and ensuring uniform growth of epitaxial layers. It is widely used in epitaxial equipment such as MOCVD and LPCVD.

VeTek Semiconductor Alumina Ceramic Vacuum Chuck plays a vital role in the wafer thinning and grinding stages of semiconductor manufacturing. These stages involve precisely reducing the thickness of the wafer substrate to enhance chip heat dissipation, which is essential to improving the efficiency and life of semiconductor devices.

Compatible with Multiple Wafer Sizes: VeTek Semiconductor Alumina Ceramic Vacuum Chuck is designed to support a wide range of wafer sizes, including 2, 3, 4, 5, 6, 8, and 12 inches. This adaptability makes it suitable for a variety of semiconductor production environments, ensuring consistent and reliable performance across different wafer sizes.

Superior Material Composition: The base of the Alumina Ceramic Vacuum Chuck is made of ultra-pure 99.9999% Alumina (Al₂O₃), which offers excellent resistance to chemical attack and thermal stability. The chuck surface is made of porous silicon carbide (SiC). The porous ceramic material has a dense and uniform structure, which improves its durability and performance.

Benefits of Porous Ceramic Technology：

Material Purity and Durability: Made of 99.99% pure Alumina, our Alumina Ceramic Vacuum Chuck resists chemical attack and offers excellent thermal stability, making it ideal for extremely demanding manufacturing environments.

Optimal Porosity and Air Permeability: Evenly distributed micropores provide excellent air permeability and uniform adsorption force, resulting in smooth and consistent operation.

Enhanced Flatness and Parallelism: Microporous Alumina Ceramic Vacuum Chucks have excellent flatness and parallelism, ensuring precise wafer handling and stability.

Customized Service Capabilities: VeTekSemi can provide a variety of customizable shapes, including round, square, ring and other designs, with thickness ranging from 3MM to 10MM. This customization ensures that our alumina ceramic vacuum chucks meet the specific needs of different semiconductor manufacturing processes and are definitely your ideal choice.

VeTek Semiconductor is committed to providing advanced technology and product solutions for the semiconductor industry, and we sincerely hope to be your long-term partner in China.

The Chemical formula of alumina ceramics：

VeTek Semiconductor Alumina Ceramic Vacuum Chuck Shops: