Ceramic Electrostatic Chuck

Semiconductor production processes, especially wafer processing, are carried out in a vacuum environment, and mechanically clamping wafers carries 

certain risks. When the force is concentrated on the clamping point, brittle silicon wafers may shed tiny fragments, causing serious damage to wafer production.

In this case, the Ceramic Electrostatic Chuck becomes a better choice, which fixes the wafer by electrostatic force. The electrostatic force acts evenly on the wafer, so the wafer can be fixed flatly, improving the accuracy of the process.

According to relevant research papers, Ceramic Electrostatic Chuck have stronger suction than other electrostatic chucks. For example, Ceramic Electrostatic Chuck has much stronger suction than PET film electrostatic chuck.

Ceramics Chuck is usually made of high-performance ceramic materials such as Al2O3, AlN or SiC, which has high heat resistance, insulation and corrosion resistance. Porous SiC Ceramic Chuck is not only stable at extreme temperatures, but also effectively prevents Ceramic E-chuck from degradation due to chemical reagents and plasma etching during the manufacturing process.

Temperature control: The high thermal conductivity and stable thermal properties of ceramic materials enable Alumina Ceramic Vacuum Chuck to effectively control temperature, thereby optimizing the temperature distribution during the process.

Vacuum adaptability: Ceramic Electrostatic Chuck is suitable for vacuum environments, especially in low-pressure and high-precision etching processes.

Low particle generation: Porous SiC Ceramic E-chuck has a smooth surface, which can reduce particle contamination during wafer fixing and help improve product yield.

Application: Mainly used in semiconductor manufacturing,Detachable Ceramic Electrostatic Chuck providing precise positioning and stability, which is very helpful for lithography, etching and other semiconductor wafer processing manufacturing processes. Ensure that the wafer is intact during processing and improve the quality of chip production.

VeTek Semiconductor Ceramic E-chuck production shops: