UV LED Epi Susceptor

As a leading Chinese semiconductor product manufacturer and leader, VeTek Semiconductor has been focusing on various types of suceptor products such as UV LED Epi Susceptor, Deep-UV LED Epitaxial Susceptor, SiC Coating Susceptor, MOCVD Susceptor, etc. for many years. VeTek Semiconductor is committed to providing advanced technology and product solutions for the semiconductor industry, and we sincerely look forward to becoming your partner in China.

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Product Description

VeTek Semiconductor's UV LED Epi Susceptor is usually made of materials such as silicon carbide (SiC) or graphite, and usually has a specialized coating to enhance its performance under high temperature conditions.

During the deep ultraviolet (DUV) epitaxy process, the excellent thermal conductivity of the UV LED Epi Susceptor can ensure uniform heat distribution on the substrate surface, which is essential for achieving uniform growth of the epitaxial layer. And uniform heating helps maintain the quality and consistency of the UV LED layer.

At the same time, during the epitaxial growth process, the UV LED Epi Susceptor can firmly fix the substrate such as the wafer, thereby ensuring the accuracy and stability of the substrate position during the deposition process. Combined with the excellent chemical resistance of silicon carbide or coated graphite susceptors, it protects both the substrate and the susceptor itself. Therefore, UV LED Epi Susceptor is an indispensable key component in the semiconductor epitaxial growth process.

As an industry leader in UV LED Epi Susceptor products, VeTek Semiconducto always supports product customization services and satisfactory product prices. No matter what your specific requirements are, we will match the best solution for your needs and look forward to your consultation at any time.