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China Tantalum Carbide Coating Manufacturer, Supplier, Factory
VeTek semiconductor is a leading manufacturer of Tantalum Carbide Coating materials for the semiconductor industry. Our main product offerings include CVD tantalum carbide coating parts, sintered TaC coating parts for SiC crystal growth or semiconductor epitaxy process. Passed ISO9001, VeTek Semiconductor has good control on quality. VeTek Semiconductor is dedicated to become innovator in Tantalum Carbide Coating industry through ongoing research and development of iterative technologies.
The main products are Tantalum Carbide coating defector ring, TaC coated diversion ring, TaC coated halfmoon parts, Tantalum Carbide Coated Planetary Rotation Disk (Aixtron G10) , TaC Coated Crucible; TaC Coated Rings; TaC Coated Porous Graphite; Tantalum Carbide Coating Graphite Susceptor; TaC Coated Guide Ring; TaC Tantalum Carbide Coated Plate; TaC Coated Wafer Susceptor; TaC Coating Ring; TaC Coating Graphite Cover; TaC Coated Chunk etc., the purity is below 5ppm, can meet customer requirements.
TaC coating graphite is created by coating the surface of a high-purity graphite substrate with a fine layer of tantalum carbide by a proprietary Chemical Vapor Deposition (CVD) process.The advantage is showed in below picture:
The tantalum carbide (TaC) coating has gained attention due to its high melting point of up to 3880°C, excellent mechanical strength, hardness, and resistance to thermal shocks, making it an attractive alternative to compound semiconductor epitaxy processes with higher temperature requirements, such as Aixtron MOCVD system and LPE SiC epitaxy process.It also has a wide application in PVT method SiC crystal growth process.
Key Features:
● Temperature stability
● Ultra high purity
● Resistance to H2, NH3, SiH4,Si
● Resistance to thermal stock
● Strong adhesion to graphite
● Conformal coating coverage
● Size up to 750 mm diameter(The only manufacturer in China reaches this size)
Applications:
● Inductive heating susceptor
● Resistive heating element
● Heat shield
Tantalum carbide (TaC) coating on a microscopic cross-section:
Parameter of VeTek Semiconductor Tantalum Carbide Coating:
| Physical properties of TaC coating | |
| Density | 14.3 (g/cm³) |
| Specific emissivity | 0.3 |
| Thermal expansion coefficient | 6.3 10-6/K |
| Hardness (HK) | 2000 HK |
| Resistance | 1×10-5 Ohm*cm |
| Thermal stability | <2500℃ |
| Graphite size changes | -10~-20um |
| Coating thickness | ≥20um typical value (35um±10um) |
TaC coating EDX data：
TaC coating crystal structure data:
| Element | Atomic percent | |||
| Pt. 1 | Pt. 2 | Pt. 3 | Average | |
| C K | 52.10 | 57.41 | 52.37 | 53.96 |
| Ta M | 47.90 | 42.59 | 47.63 | 46.04 |
- View as
CVD TaC Coating Ring
VeTek Semiconductor's CVD TaC Coating Ring is a highly advantageous component designed to meet the demanding requirements of silicon carbide (SiC) crystal growth processes. The CVD TaC Coating Ring provides outstanding high-temperature resistance and chemical inertness, making it an ideal choice for environments characterized by elevated temperatures and corrosive conditions.We are committed to providing quality products at competitive prices and look forward to being your long-term partner in China.
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LPE SiC EPI Halfmoon
LPE SiC Epi Halfmoon by VeTek Semiconductor, a revolutionary product designed to elevate LPE reactor SiC epitaxy processes. This cutting-edge solution boasts several key features that ensure superior performance and efficiency throughout your manufacturing operations.Looking forward to setting up long term cooperation with you.
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LED EPI Susceptor
VeTek Semiconductor is a leading supplier of TaC coatings and SiC coating graphite parts. We specialize in the production of cutting-edge LED EPI Susceptors, essential for LED epitaxy processes. With a strong focus on innovation and quality, we offer reliable solutions that meet the stringent requirements of the LED industry. Contact us today to discuss your inquiries and discover how our products can enhance your manufacturing processes.
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MOCVD Susceptor with TaC Coating
VeTek Semiconductor is a comprehensive supplier involved in the research, development, production, design, and sales of TaC coatings and SiC coating parts. Our expertise lies in the production of state-of-the-art MOCVD Susceptor with TaC Coating, which play a vital role in the LED epitaxy process. We welcome you to discuss with us inquiries and further information.
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TaC Coated Deep UV LED Susceptor
VeTek Semiconductor is an integrated supplier engaged in research and development, production, design, and sales of TaC coatings. We specialize in manufacturing edge-cutting TaC Coated UV LED Susceptors, which are crucial components in the LED epitaxy process. Our TaC Coated Deep UV LED Susceptor offer high thermal conductivity, high mechanical strength, improved production efficiency, and epitaxial wafer protection. Welcome to inquiry us.
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Tantalum Carbide TaC Coated Halfmoon
VeTek Semiconductor is the leading manufacturer and supplier in China for Tantalum Carbide TaC Coated Halfmoon, we specialized in R&D and production,can control the quality well and offer a competitive price. You are welcome to visit our factory for further discussion on a long-term cooperation.
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As a professional Tantalum Carbide Coating manufacturer and supplier in China, we have our own factory. Whether you need customized services to meet the specific needs of your region or want to buy advanced and durable Tantalum Carbide Coating made in China, you can leave us a message.
