VeTek Semiconductor is the leading manufacturer and supplier in China for Tantalum Carbide TaC Coated Halfmoon, we specialized in R&D and production,can control the quality well and offer a competitive price. You are welcome to visit our factory for further discussion on a long-term cooperation.
VeTek Semiconductor is a professional China Tantalum Carbide TaC Coated Halfmoon manufacturer and supplier. VeTek Semiconductor offers Tantalum Carbide TaC Coated Halfmoon, which plays a supporting and transporting role in the epitaxial process of silicon carbide, it not only support the substrate, but also provide a flat foundation, allowing the epitaxy to grow uniformly on it.
The quality and performance of the halfmoon part directly affect the quality and performance of the wafer during the silicon carbide epitaxial process. Therefore, designing and selecting the appropriate halfmoon part is crucial for the success of the SiC epitaxial process. The Tantalum Carbide TaC Coated Halfmoon made by VeTek Semiconductor can enhance its high temperature resistance, corrosion resistance, and wear resistance, greatly improving the stability and lifespan of the half moon component during the growth process.
Physical properties of TaC coating | |
Density | 14.3 (g/cm³) |
Specific emissivity | 0.3 |
Thermal expansion coefficient | 6.3 10-6/K |
Hardness (HK) | 2000 HK |
Resistance | 1×10-5 Ohm*cm |
Thermal stability | <2500℃ |
Graphite size changes | -10~-20um |
Coating thickness | ≥20um typical value (35um±10um) |
1.High temperature resistance
2.High corrosion resistance
3.High hardness and wear resistance
4.Good thermal conductivity
5.Good Chemical inertness