EPI susceptor

VeTek Semiconductor is a professional leader China EPI susceptor,ALD Planetary Susceptor,TaC Coated Graphite Susceptor manufacturer.

VeTek Semiconductor’s EPI susceptor is an important component of epitaxial growth In the semiconductor manufacturing process. Its main function is to support and heat the wafer so that a high-quality epitaxial layer can be uniformly grown on the wafer surface.

VeTek Semiconductors’ EPI susceptors are usually made of high-purity graphite and coated with a layer of silicon carbide (SiC). This design has the following key advantages:

High temperature stability: The EPI susceptor can remain stable in a high temperature environment, ensuring the uniform growth of the epitaxial layer.

Corrosion resistance: The SiC coating has excellent corrosion resistance and can resist the erosion of chemical gases, extending the service life of the tray.

Thermal conductivity: The high thermal conductivity of SiC material ensures uniform temperature distribution of the wafer during heating, thereby improving the quality of the epitaxial layer.

Thermal expansion coefficient matching: The thermal expansion coefficient of SiC is similar to that of graphite, avoiding the problem of coating shedding due to thermal expansion and contraction.

Basic physical properties of EPI susceptor:

CVD SiC Coating Production Shop:

Overview of the semiconductor chip epitaxy industry chain: