CVD SiC coating graphite susceptor

CVD SiC coating graphite susceptor is specially designed for high-precision manufacturing in the semiconductor industry. The graphite substrate is coated with a high-purity SiC layer by the CVD process, which has excellent high temperature resistance, corrosion resistance and oxidation resistance, and can operate stably for a long time in high temperature and vacuum environments. This pedestal is widely used in MOCVD, PECVD, PVD and other equipment to support the processing and handling of wafers and other high-precision materials.

Core advantages:

● High temperature stability: High-purity graphite itself has excellent thermal stability. After being coated with SiC coating, it can withstand higher temperature extreme environments and is suitable for high temperature processes in semiconductor processing.

● Corrosion resistance: CVD SiC coating is resistant to acid and alkali corrosion and can have a long service life in the CVD process.

● High hardness and oxidation resistance: CVD SiC coating has excellent hardness, scratch resistance, and oxidation resistance at high temperatures to maintain the stability of the material.

● Good thermal conductivity: The combination of graphite substrate and CVD SiC coating susceptor makes the base have excellent thermal conductivity, which can effectively conduct heat and improve production efficiency.

Product Specifications:

● Material: graphite substrate + CVD SiC coating

● Coating thickness: can be customized according to customer needs

● Applicable environment: high temperature, vacuum, corrosive gas environment

Customized service:

We provide highly customized services to meet the needs of customers' different equipment and processes. According to the customer's specific application, graphite bases with different coating thicknesses, surface treatments and precision levels can be provided.

VeTekSemi has always been working in the CVD Silicon Carbide coating industry and has the industry-leading CVD SiC coating graphite base production and manufacturing level. If you need more product information or customized services, please contact VeTek Semiconductor, we will wholeheartedly provide you with professional support.

SEM DATA OF CVD SIC FILM CRYSTAL STRUCTURE:

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