TaC Coated ring

VeTeksemi TaC Coated Ring is a high performance component tailored for semiconductor manufacturing processes. Its uniquely designed tantalum carbide (TaC) coating gives the product excellent high temperature resistance, corrosion resistance and mechanical stability, significantly improving the service life and reliability of graphite components in semiconductor equipment.

Superior performance of tantalum carbide coatings：

●   Ultra-high temperature resistance: TaC coatings can easily withstand extreme temperatures of up to 2200°C and remain stable under thermal shock environments common in semiconductor manufacturing.

●   Excellent chemical stability: The coating shows strong resistance to common corrosive gases such as hydrogen, ammonia, silane and silicon, effectively protecting the substrate from chemical attack.

●   Excellent mechanical properties: TaC coating has high hardness, high wear resistance and good thermal shock resistance, and can operate stably for a long time under harsh working conditions.

●   Excellent adhesion: The coating is tightly bonded to the graphite substrate, effectively preventing the coating from peeling off and ensuring consistent performance throughout the product's service life.

●   High purity: The TaC coating prepared by CVD has extremely high purity, which minimizes the introduction of impurities and provides a clean process environment for semiconductor manufacturing.

Advantages of Tantalum Carbide Coated Rings:

●   Extended equipment life: TaC coating effectively blocks chemical reactions and impurity diffusion, significantly extending the service life of graphite components and reducing maintenance costs.

●   Improve production efficiency: The product's high temperature resistance and corrosion resistance enable it to operate under more demanding conditions, shortening the production cycle and increasing production capacity.

●   Improved product quality: High purity TaC coating helps reduce contamination, ensuring the quality and consistency of semiconductor products.

VeTek Semiconductor has been specialized in TaC coating products such as TaC Coating Chuck, TaC Coating Rotation Plate, TaC Coating Susceptor, TaC coated wafer susceptor for many years. Our TaC Coated ring products have the functions of Extended equipment life, Improved production efficiency and Improved product quality. At the same time, VeTek Semiconductor has long been committed to providing advanced technology and product solutions for the semiconductor industry. We sincerely hope to become your long-term partner in China.

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