TaC Coated Graphite Wafer Carrier

VeTek Semiconductor is a leading TaC Coated Graphite Wafer Carrier manufacturer and innovator in China.We have been specialized in SiC and TaC coating for many years.Our TaC coated graphite wafer carrier has a higher temperature resistance and wear-resistant. We look forward to becoming your long-term partner in China.

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Product Description

You can rest assured to buy customized TaC Coated Graphite Wafer Carrier from VeTek Semiconductor. We look forward to cooperating with you, if you want to know more, you can consult us now, we will reply to you in time!

VeTek Semiconductor TaC Coated Graphite Wafer Carrier directly interacts with wafers in the epitaxy reactor, enhancing efficiency and performance. With the option of silicon carbide or tantalum carbide coating, VeTek Semiconductor TaC Coated Graphite Wafer Carrier offers extended lifespan, up to 2-3 times longer with tantalum carbide. Compatible with various machine models, including LPE SiC epitaxy furnaces, JSG, NASO epitaxial furnaces.

VeTek Semiconductor TaC-coated graphite carrier ensures precise reaction stoichiometry, prevents impurity migration, and maintains temperature stability beyond 2000°C. It exhibits remarkable resistance to H2, NH3, SiH4, and Si, safeguarding against harsh chemical environments. Withstanding thermal shocks, it enables fast operational cycles without coating delamination.

VeTek Semiconductor TaC coating guarantees ultra-high purity, eliminates impurities, and ensures conformal coverage meeting stringent dimensional tolerances. With VeTek Semiconductor's advanced graphite processing capabilities, we are equipped to meet your customization needs. Whether you require coating services or comprehensive solutions, our team of expert engineers is ready to design the perfect solution for your specific applications. Trust us to deliver high-quality products tailored to your requirements and expectations.

Product parameter of the TaC Coated Graphite Wafer Carrier

Physical properties of TaC coating
Density	14.3 (g/cm³)
Specific emissivity	0.3
Thermal expansion coefficient	6.3 10-6/K
Hardness (HK)	2000 HK
Resistance	1×10-5 Ohm*cm
Thermal stability	<2500℃
Graphite size changes	-10~-20um
Coating thickness	≥20um typical value (35um±10um)