SiC Coating Susceptor

Vetek Semiconductor focuses on the research and development and industrialization of CVD SiC coating and CVD TaC coating. Taking SiC coating susceptor as an example, the product is highly processed with high precision, dense CVD SIC coating, high temperature resistance and strong corrosion resistance. An inquiry into us is welcome.

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Product Description

You can rest assured to buy SiC coating susceptor from our factory.

As the CVD SiC coating manufacturer, VeTek Semiconductor would like to provide you SiC Coating Susceptors which is made of high purity graphite and SiC coating susceptor(below 5ppm).Welcome to inquiry us.

At Vetek Semiconductor, we specialize in technology research, development, and manufacturing, offering a range of advanced products for the industry. Our main product line includes CVD SiC coating+high purity graphite, SiC coating susceptor, semiconductor quartz, CVD TaC coating+high purity graphite, rigid felt, and other materials.

One of our flagship products is the SiC Coating Susceptor, developed with innovative technology to meet the stringent requirements of epitaxial wafer production. Epitaxial wafers must exhibit tight wavelength distribution and low surface defect levels, making our SiC coating susceptor an essential component in achieving these crucial parameters.

Advantages of our SiC Coating Susceptor:

Base Material Protection: The CVD SiC coating acts as a protective layer during the epitaxial process, effectively shielding the base material from erosion and damage caused by the external environment. This protective measure greatly extends the service life of the equipment.

Excellent Thermal Conductivity: Our CVD SiC coating possesses outstanding thermal conductivity, efficiently transferring heat from the base material to the coating surface. This enhances thermal management efficiency during epitaxy, ensuring optimal operating temperatures for the equipment.

Improved Film Quality: The CVD SiC coating provides a flat and uniform surface, creating an ideal foundation for film growth. It reduces defects resulting from lattice mismatch, enhances the crystallinity and quality of the epitaxial film, and ultimately improves its performance and reliability.

Choose our SiC Coating Susceptor for your epitaxial wafer production needs, and benefit from enhanced protection, superior thermal conductivity, and improved film quality. Trust in VeTek Semiconductor's innovative solutions to drive your success in the semiconductor industry.

Basic physical properties of CVD SiC coating:

Basic physical properties of CVD SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Density	3.21 g/cm³
Hardness	2500 Vickers hardness（500g load）
Grain SiZe	2~10μm
Chemical Purity	99.99995%
Heat Capacity	640 J·kg-1·K-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m-1·K-1
Thermal Expansion(CTE)	4.5×10-6K-1