LED Epitaxy susceptor

VeTek Semiconductor's LED Epitaxy susceptor is designed for blue and green LED epitaxial manufacturing. It combines silicon carbide coating and SGL graphite, and has high hardness, low roughness, good thermal stability and excellent chemical stability. LED Epitaxy susceptor is one of VeTek Semiconductor's most outstanding products. We look forward to your inquiry.

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Product Description

In the field of blue and green LED manufacturing, LED Epitaxy susceptor, as one of the best products in the current market, demonstrates VeTek Semiconductor's strong manufacturing capabilities. LED EPI Susceptor is seamlessly connected to AMEC MOCVD equipment, which also proves VeTek Semiconductor's good cooperative relationship with large enterprises. Combining the excellent performance of silicon carbide coating with the excellent characteristics of SGL graphite, this Susceptor provides unparalleled support for LED epitaxial growth, helping LED companies stand out in the fierce market competition.

Core material advantages

(I) Silicon carbide coating

Silicon carbide coating gives LED Epitaxy susceptor excellent surface hardness, enabling it to resist various physical wear and scratches during LED epitaxial growth. Maintaining the flatness and smoothness of the surface for a long time ensures that the uniformity of epitaxial layer growth is not affected, effectively improving the yield and consistency of the product. Thereby reducing the formation of crystal defects and significantly improving the luminous efficiency and electrical performance of blue and green LEDs. At the same time, the silicon carbide coating has excellent chemical stability. It does not react with the chemical reactants in the MOCVD equipment, avoiding the introduction of impurities and corrosion of the coating.

(II) SGL Graphite

VeTek Semiconductor uses SGL graphite as the substrate. During the epitaxial growth of blue and green LEDs, SGL graphite can quickly conduct the heat generated by the reaction, effectively reducing the temperature gradient of the Susceptor and ensuring the temperature uniformity of the entire growth area. This helps to reduce crystal defects caused by thermal stress and improve the crystal quality and reliability of LED chips.

The good processing performance of SGL graphite allows the Susceptor to be accurately processed into various complex shapes and sizes to meet the needs of different types of MOCVD equipment and LED manufacturing processes.

Technical Performance Indicators of SiC coating

Technical Performance Indicators of SiC coating
Property	Typical Value
Crystal Structure	FCC β phase polycrystalline, mainly (111) oriented
Coating Density	3.21 g/cm³
SiC coating Hardness	2500 Vickers hardness（500g load）
Grain Size	2~10μm
Chemical Purity	99.99995%
SiC coating Heat Capacity	640 J·kg^-1·K^-1
Sublimation Temperature	2700℃
Flexural Strength	415 MPa RT 4-point
Young' s Modulus	430 Gpa 4pt bend, 1300℃
Thermal Conductivity	300W·m^-1·K^-1
Thermal Expansion(CTE)	4.5×10^-6K^-1

VeTek Semiconductor has a professional technical team that can provide customers with a full range of technical consulting services for LED Epitaxy susceptor. Whether it is the principle and characteristics of the product, or the process optimization and problem solving in actual applications, our experts can provide detailed and professional guidance to improve customers' technical level and production capacity.