High purity graphite ring

High purity graphite ring is suitable for GaN epitaxial growth processes. Their excellent stability and superior performance have made them widely used. VeTek Semiconductor produces and manufactures world-leading High purity graphite ring to help the GaN epitaxy industry continue to progress. VeTekSemi looks forward to becoming your partner in China.

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Product Description

Simple diagram of GaN epitaxial growth The process of GaN epitaxial growth is carried out in a high-temperature, corrosive environment. The hot zone of the GaN epitaxial growth furnace is usually equipped with heat-resistant and corrosion-resistant high-purity graphite parts, such as heaters, crucibles, graphite electrodes, crucible holders, electrode nuts, etc. graphite ring seal is one of the important parts.

VeTek Semiconductor's High-purity graphite ring is made of pure graphite with extremely high purity, and the ash content of the finished product can be <5PPM.

And the graphite rings have the characteristics of high temperature resistance and corrosion resistance, good electrical and thermal conductivity, chemical stability, and thermal shock resistance, making them suitable for use in GaN epitaxial growth furnaces.

VeTek Semiconductor's high-purity graphite rings are made of the highest quality graphite, with stable performance and long service life. If you need to perform GaN epitaxial growth, our high-purity graphite rings are the best choice of graphite parts.

VeTek Semiconductor can provide customers with highly customized products, whether it is the size or material of the ring, it can meet the various requirements of customers. We are is waiting for your consultation at any time.

Material data of SGL 6510 graphite

Typical properties	Units	Test standards	Values
Average grain size	μm	ISO 13320	10
Bulk density	g/cm³	DIN IEC 60413/204	1.83
Open porosity	Vol.%	DIN 66133	10
Medium pore entrance diameter	μm	DIN 66133	1.8
Coefficient of permeability(ambient temperature)	cm²/s	DIN 51935	0.06
Rockwell hardness HR_5/100	\	DIN IEC 60413/303	90
Resistivity	μΩm	DIN IEC 60413/402	13
Flexural strength	MPa	DIN IEC 60413/501	60
Compressive strength	MPa	DIN 51910	130
Dynamic modulus of elasticit	MPa	DIN 51915	11.5 x 10³
Thermal expansion(20-200℃)	K^-1	DIN 51909	4.2x10^-6
Thermal conductivity(20℃)	Wm^-1K^-1	DIN 51908	105
Ash content	ppm	DIN 51903	\