VeTek Semiconductor is a leading CVD SiC Shower Head manufacturer and innovator in China.We have been specialized in SiC material for many years.CVD SiC Shower Head is chosen as a focusing ring material due to its excellent thermochemical stability, high mechanical strength and resistance to plasma erosion. We look forward to becoming your long-term partner in China.
You can rest assured to buy CVD SiC Shower Head from our factory. VeTek Semiconductor CVD SiC Shower Head is made from solid silicon carbide (SiC) using advanced chemical vapor deposition (CVD) techniques. SiC is chosen for its exceptional thermal conductivity, chemical resistance, and mechanical strength, ideal for large-volume SiC components like the CVD SiC Shower Head.
Designed for semiconductor manufacturing, the CVD SiC Shower Head withstands high temperatures and plasma processing. Its precise gas flow control and superior material properties ensure stable processes and long-term reliability. The use of CVD SiC enhances thermal management and chemical stability, improving semiconductor product quality and performance.
The CVD SiC Shower Head enhances epitaxial growth efficiency by distributing process gases uniformly and safeguarding the chamber from contamination. It effectively resolves semiconductor manufacturing challenges such as temperature control, chemical stability, and process consistency, providing reliable solutions to customers.
Utilized in MOCVD systems, Si epitaxy, and SiC epitaxy, the CVD SiC Shower Head supports high-quality semiconductor device production. Its critical role ensures precise process control and stability, meeting diverse customer requirements for high-performance and dependable products.
Physical properties of Solid SiC | |||
Density | 3.21 | g/cm3 | |
Electricity Resistivity | 102 | Ω/cm | |
Flexural Strength | 590 | MPa | (6000kgf/cm2) |
Young's Modulus | 450 | GPa | (6000kgf/mm2) |
Vickers Hardness | 26 | GPa | (2650kgf/mm2) |
C.T.E.(RT-1000℃) | 4.0 | x10-6/K | |
Thermal Conductivity(RT) | 250 | W/mK |